Actuators for objective lens positioning are indispensable components for writing and reading data to and from optical storage media. Significant advances in the technical capabilities of microlens actuators for optical heads have been achieved using MEMS technology, enabling miniaturisation and integration of optical data storage systems. In this reported work, a compact silicon-on-glass (SOG) actuator for two-dimensional (2D) positioning of a dispensed polymer microlens is developed by MEMS technology. A wafer-level process for fabrication of the SOG actuator is achieved using anodic bonding, in which a Pyrex wafer was bonded with an ultra-thin silicon wafer. Dispensed polymer microlenses are fabricated and subsequently integrated onto the 2D actuator by an automatic handling system. Typical displacements of about ±28.6 μm in the tracking direction and 3.2 μm in the focusing direction are experimentally characterised. The compact 2D SOG actuator and assembly technology may be particularly useful for expanding the application area for the optical head.1. Introduction: Lens actuators are indispensable components for writing and reading data to and from optical storage media, which decides the performance of the read-out system. Microlens actuators and scanners have been extensively investigated using MEMS technology [1, 2], enabling miniaturisation and integration of optical data storage systems [3,4]. Different actuation methods such as thermal actuators [5], electrostatic methods [6] and magnetic means [7] have been demonstrated for microlens tracking (horizontal) and focusing (vertical) actuators. Among them, electrostatic actuators have advantages including fast response, small size and the compatibility of materials, and are particularly attractive for microlens positioning. We have previously reported an integrated two-dimensional (2D) microlens actuator using a silicon-on-insulator (SOI) process [8]. A double-side process is employed to define the integrated comb-drive tracking and focusing actuators to achieve 2D movements of the microlens.In this reported work, we designed a 2D silicon-on-glass (SOG) microactuator which obtains the tracking and focusing effect of a dispensed polymer microlens by horizontal comb-drives and electrostatic parallel plates, respectively. An anodic bonding-based process is optimised to define the actuator using an ultra-thin silicon wafer and a Pyrex wafer. Moreover, high quality polymer microlenses are designed, fabricated and integrated onto the fabricated 2D actuators by an automatic handling system. The polymer microlenses are profiled and typical displacements of about ±28.6 μm in the tracking direction and 3.2 μm in the focusing direction of the integrated actuator are experimentally characterised. The compact 2D SOG actuators enable miniaturisation and integration of the microactuators for high capacity and high-density data storage systems.