2014
DOI: 10.1109/jmems.2013.2262599
|View full text |Cite
|
Sign up to set email alerts
|

Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup

Abstract: We describe a microelectromechanical systemsbased actuator for three-dimensional (3D) positioning of a polymer microlens implemented using silicon-on-glass technology. The actuator combines comb drives for lateral tracking with electrostatic parallel plates for out-of-plane focusing as well as tilting of a polymer microlens, yielding fully 3D actuation. The complete actuator is fabricated using wafer bonding of silicon and pyrex wafers; the lens is integrated using polymer dispensing techniques. The 3 DOF posi… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2019
2019
2023
2023

Publication Types

Select...
6

Relationship

1
5

Authors

Journals

citations
Cited by 15 publications
(2 citation statements)
references
References 27 publications
0
2
0
Order By: Relevance
“…The smooth surface of the etched Pyrex chamber was obtained after wet etching and the surface roughness is comparable with that of the original polished Pyrex surface. Moreover, further optical experiments show that the transmission is sufficient for the spectral range employed [11]. The springs and comb structures were fabricated and no fracture‐related issues were found during the fabrication.…”
Section: Resultsmentioning
confidence: 99%
“…The smooth surface of the etched Pyrex chamber was obtained after wet etching and the surface roughness is comparable with that of the original polished Pyrex surface. Moreover, further optical experiments show that the transmission is sufficient for the spectral range employed [11]. The springs and comb structures were fabricated and no fracture‐related issues were found during the fabrication.…”
Section: Resultsmentioning
confidence: 99%
“…Microelectromechanical system (MEMS) scanners with large vertical actuation of both the micromirror and microlens have a wide range of applications, including optical pickup [1], multiphoton microscopy [2], Fourier transform spectrometry [3,4], confocal microscopy [5], optical coherence tomography [6], and micro optical diffusion sensing [7][8][9]. MEMS scanners based on electrostatic [2,7,10,11], piezoelectrical [12], and electromagnetic [13] actuation mechanisms can achieve high-speed scanning.…”
Section: Introductionmentioning
confidence: 99%