Comparative analysis of materials for the design of a highly sensitive capacitive type of MEMS pressure sensor

Preethi, A.; Chitra, L.

doi:10.1109/ncetnresem.2014.7088730

Cited by 4 publications

(1 citation statement)

References 3 publications

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“…The film is made up of graphene oxide. Graphene oxide is set by customized hummer's technique [19][20]. The paddle shaped cantilever structure is designed and the graphene oxide film is formed by spin coating.…”

Section: A Sensor Designmentioning

confidence: 99%

Design and Fabrication of MEMS Humidity Sensor using Graphene Oxide

2019

IJITEE

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This work describes the consequence of graphene oxide on the paddle shaped cantilever structure for the measurement of humidity in oil condition monitoring .The oxides present in the graphene has an significant effect in absorbing the content of water that available in the earth. The model for humidity sensor is designed and simulated using comsol Multiphysics. Various structures were simulated and the best structure is chosen for designing the humidity sensor. Graphene oxide was chemically synthesized from graphite powder. Thin film of GO was deposited on Aluminium substrate using spin coating. Various materials were analysed and the best material is coated on the substrate for humidity sensing. The samples were characterized using Scanning electron Microscope and Xray Diffraction methods. The sensitivity is ten times better than the conventional humidity sensor. The response time is fast less than ¼ of the conventional type. The recovery time of the graphene oxide based humidity sensor is also less than ½ of the conventional one.

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Section: A Sensor Designmentioning

confidence: 99%

Design and Fabrication of MEMS Humidity Sensor using Graphene Oxide

2019

IJITEE

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Improvement in Sensing Characteristics of Silicon Microstructure based MEMS Capacitive Sensor for Automotive Applications

Suman

Punetha

Pandey

2020

Silicon

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Study of a novel capacitive pressure sensor using spiral comb electrodes

Chen,

Yang,

Liu

et al. 2024

Meas. Sci. Technol.

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For traditional capacitive pressure sensors, high nonlinearity and poor sensitivity greatly limited their sensing applications. Hence, an innovative design of capacitors based on spiral comb electrodes is proposed for high-sensitivity pressure detection in this work. Compared to traditional capacitive pressure sensors with straight plate comb electrodes, the proposed sensor with the spiral comb electrodes increases the overlap areas of electrodes sufficiently, the pressure sensitivity can thus be greatly improved. Moreover, the capacitance variation of the proposed sensor is dominated by the change of the overlap area of the electrodes rather than the electrode’s distance, the linearity can also thus be improved to higher than 0.99. Theoretical analysis and COMSOL-based finite element simulation have been implemented for principle verification and performance optimization. Simulation results show that the proposed design has a mechanical sensitivity of 1.5 × 10−4 m Pa−1, capacitive sensitivity of 1.10 aF Pa−1, and nonlinear error of 3.63%, respectively, at the pressure range from 0 to 30 kPa. An equivalent experiment has been further carried out for verification. Experimental results also show that both the sensitivity and linearity of capacitive pressure sensors with spiral comb electrodes are higher than those with straight comb electrodes. This work not only provides a new avenue for capacitor design, but also can be applied to high-sensitivity pressure detection.

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Comparative analysis of materials for the design of a highly sensitive capacitive type of MEMS pressure sensor

Cited by 4 publications

References 3 publications

Design and Fabrication of MEMS Humidity Sensor using Graphene Oxide

Design and Fabrication of MEMS Humidity Sensor using Graphene Oxide

Improvement in Sensing Characteristics of Silicon Microstructure based MEMS Capacitive Sensor for Automotive Applications

Study of a novel capacitive pressure sensor using spiral comb electrodes

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