MEMS Comb drive type capacitive pressure sensor with high sensitivity can be used in many applications like Aerospace, Automobile, Bio MEMS, etc. This Paper is focused on the review of various types of MEMS Materials used in capacitive pressure sensor. In this paper comparative analysis of different types of MEMS materials are presented. The principle and design of proposed MEMS Comb drive type capacitive pressure sensor is explained. The MEMS comb drive type capacitive pressure sensor is simulated using COMSOL multiphysics 4.4 version. Centre deflection or deformation of a thin diaphragm and capacitive sensitivity analysis are carried out for various types of MEMS material. The analysis is carried out for the range of pressure from 0 to lOOOOON/m 2 • Finally the comparisons of MEMS materials used in Comb drive type capacitive pressure sensor shows that Aluminum (AI) has high capacitive sensitivity about 36aF/O.lbar is obtained.
To maintain the good quality of fabric, inspection is important. In Fabric industry the inspection is done manually which are time consuming, stressful and involves more manpower. This traditional inspection for fabric defects is insufficient and costly. To improve the performance, automated fabric defect detection plays a vital role. This methodology results in production of high quality products with less time. The image processing techniques are applied for the input defective fabric, convert into grey scale images, noise filtering ,binary image conversion, thresholding and the calculated output is received. The automated system based on deep learning algorithms is used to detect the defect. The proposed system will efficiently detect the fabric defects with improved accuracy in less time.
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