Comparative analysis of the sensitivity of nanometallic thin film thermometers

Abstract

Thin film platinum resistive thermometers are conventionally applied for resistance thermometry techniques due to their stability and proven measurement accuracy. Depending upon the required thermometer thickness and temperature measurement, however, performance benefits can be realized through the application of alternative nanometallic thin films. Herein, a comparative experimental analysis is provided on the performance of nanometallic thin film thermometers most relevant to microelectronics and thermal sensing applications: Al, Au, Cu, and Pt. Sensitivity is assessed through the temperature coefficient of resistance, measured over a range of 10–300 K for thicknesses nominally spanning 25–200 nm. The interplay of electron scattering sources, which give rise to the temperature-dependent TCR properties for each metal, are analyzed in the framework of a Mayadas–Shatzkes based model. Despite the prevalence of evaporated Pt thin film thermometers, Au and Cu films fabricated in a similar manner may provide enhanced sensitivity depending upon thickness. These results may serve as a guide as the movement toward smaller measurement platforms necessitates the use of smaller, thinner metallic resistance thermometers.

Research on platinum film resistance temperature sensing method

“…A. Botman et al increased the resistivity of platinum film resistors by exploring the platinum content in the deposit and subsequent processing methods to enhance their electrical conductivity [6]. Ethan A. Scott et al of the University of Virginia enhanced the sensitivity of metal film resistors by varying their thickness [7].…”

Structural and electrical properties of Pt film fabricated by laser scanning and reduction of its oxide film

“…6) It is also used practically in optical disks to create a small area in the recording layer with different optical reflectance for binary recording, for example, by using a GeTe-Sb 2 Te 3 pseudo-binary layer. 7) It is advantageous to use laser beam processing techniques for both film removal and material property modification for device fabrication, as demonstrated in this study by preparing a platinum (Pt) film thermometer 4,[8][9][10][11][12] using a Pt oxide (PtO x ; x: oxygen composition ratio) film. If a Pt film could be prepared, it could be used in electrical wiring and bolometer fabrication.…”