2005
DOI: 10.1016/j.diamond.2004.11.010
|View full text |Cite
|
Sign up to set email alerts
|

Comparative study of c-axis AlN films sputtered on metallic surfaces

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
20
0

Year Published

2006
2006
2024
2024

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 30 publications
(20 citation statements)
references
References 12 publications
0
20
0
Order By: Relevance
“…Accordingly, it is necessary to directly measure both the sign and magnitude of the piezoelectric response rather than try to infer them from the film structure. The film morphology of AlN on Ti has been reported [22, 29], but the piezoelectric response has been less frequently measured [11, 23]. We measured the piezoelectric properties of the films we deposited by two separate methods: d 33 f at the wafer scale and d 31 using microfabricated cantilevers.…”
Section: Resultsmentioning
confidence: 99%
“…Accordingly, it is necessary to directly measure both the sign and magnitude of the piezoelectric response rather than try to infer them from the film structure. The film morphology of AlN on Ti has been reported [22, 29], but the piezoelectric response has been less frequently measured [11, 23]. We measured the piezoelectric properties of the films we deposited by two separate methods: d 33 f at the wafer scale and d 31 using microfabricated cantilevers.…”
Section: Resultsmentioning
confidence: 99%
“…For each parameter, selected works that investigate its effect will be mentioned. In addition to using the works that were already summarized in Table 2 , i.e., references [ 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , 61 , 62 ], we also highlight additional articles that are not included in that table i.e., references [ 63 , 64 , 65 , 66 , 67 , 68 , 69 , …”
Section: Compilation Of Recipes and The Roles Of The Sputtering Pamentioning
confidence: 99%
“…In some sputtering experiments, the substrates were biased with an RF source to attract the Al+ ions towards them. Table 2 listed these works [ 19 , 27 , 55 , 62 ]. It is generally known that the amplitude of the bias voltage corresponds to the landing kinetic energies of these ions, which in turn determine the crystal orientation.…”
Section: Compilation Of Recipes and The Roles Of The Sputtering Pamentioning
confidence: 99%
“…Poly crystalline AlN films are widely used as piezoelectric layers for FBARs because AlN possesses a high acoustic wave velocity, a reasonable piezoelectric coupling coefficient, and a good temperature coefficient [3][4][5]. Many researchers have also investigated the influence of the electrode material on the performance of the FBARs [6][7][8][9][10][11][12], and found that Mo is suitable for the bottom electrodes due to its low resistivity, high density, and large Young's modulus [8,[11][12][13]. Several other researchers have asserted that Ru is better than Mo for the electrodes because it has a greater density and larger Young's modulus [14,15]; therefore, one can expect improved rejection levels at the pole of the FBAR characteristics by the use of Ru electrodes.…”
Section: Introductionmentioning
confidence: 99%