Comparative study of the hard and soft PZT-based ceramics sintered by various methods

Marakhovsky, M. A.; Панич, А. Е.; Таланов, М. В.; Marakhovskiy, V. A.

doi:10.1080/00150193.2021.1888225

Cited by 18 publications

(4 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…By referring to the literature, the pores are inherent defects formed in the preceding manufacture process and cannot be removed. 12 As shown in Figs. 3c and 3d, in the area without the inherent defects, a smooth PZT-4 surface without any noticeable scratches can be obtained with CMP.…”

Section: Resultsmentioning

confidence: 79%

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO₄ ²⁻

Wu¹,

Jiang²,

Zheng³

et al. 2022

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

Excellent surface quality of lead zirconate titanate (PZT) is required to achieve high performance in micro-electro-mechanical systems. In this work, PZT-4 (Pb(Zr0.44Ti0.56)O3) was processed with chemical mechanical polishing (CMP). K2SO4 was used to enhance the CMP efficiency. The results reveal that at pH 4 and 6, as the K2SO4 concentration increases, the material removal rate (MRR) and surface roughness S a first increase, then decrease and stabilize. Interestingly, at pH 6, after adding only 55 ppm SO4 2-, the MRR increases by 54%. After CMP, the surface becomes smooth. No visible processing damage occurs in the substrate. For the CMP mechanism, SO4 2- in K2SO4 plays an essential role in the MRR enhancement. At pH 6, PbO can dissolve, forming oxygen vacancies. After adding a low concentration of SO4 2-, the negatively charged SO4 2- ions can be attracted by the positively charged oxygen vacancies. Then soluble Zr(SO4)2 can be formed, promoting the dissolution of Zr4+. As a result, the surface integrity can be destroyed. Therefore, the MRR is improved. However, with a high concentration of SO4 2-, the PbSO4 precipitates can inhibit dissolution and wear. Hence, the MRR is suppressed. This research may provide a feasible approach for high-efficiency CMP of PZT.

show abstract

Section: Resultsmentioning

confidence: 79%

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO₄ ²⁻

Wu¹,

Jiang²,

Zheng³

et al. 2022

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…The device uniformly and simultaneously applied pressure with increasing temperature. The selection of technological conditions of the HP process was made based on experimental research presented in [ 70 , 71 ]. The multiferroic composite sample sintered by the HP method was labeled as PF-HP.…”

Section: Methodsmentioning

confidence: 99%

“…Pressureless sintering was performed in a furnace under 1250 °C/2 h. The multiferroic composite sample sintered by the FS method was labeled as PF-FS. The selection of technological conditions for the FS process was made based on experimental research presented in [ 70 , 71 , 72 ].…”

Section: Methodsmentioning

confidence: 99%

Influence of the Sintering Method on the Properties of a Multiferroic Ceramic Composite Based on PZT-Type Ferroelectric Material and Ni-Zn Ferrite

2022

View full text Add to dashboard Cite

This paper presents the research results of multiferroic ceramic composites obtained with three sintering methods, i.e., free sintering FS (pressureless), hot pressing HP, and spark plasma sintering SPS. The multiferroic composite was obtained by combining a ferroelectric material of the PZT-type (90%) and zinc-nickel ferrite (10%). Research has shown that the combination of a magnetic material and ferroelectric materials maintains the multiferroic good ferroelectric and magnetic properties of the composites for all sintering methods. A sample sintered with the HP hot pressing method exhibits the best parameters. In the HP method, the composite sample has high permittivity, equal to 910 (at room temperature) and 7850 (at the phase transition temperature), residual polarization 2.80 µC/cm2, a coercive field of 0.95 kV/mm, and the magnetization of 5.3 and 4.95 Am2/kg at −268 °C and RT, respectively. Optimal technological process conditions are ensured by the HP method, improving the sinterability of the ceramic sinter which obtains high density and proper material compaction. In the case of the SPS method, the sintering conditions do not allow for homogeneous growth of the ferroelectric and magnetic component grains, increasing the formation of internal pores. On the other hand, in the FS method, high temperatures favor excessive grain growth and an increase in the heterogeneity of their size. In obtaining optimal performance parameters of multiferroic composites and maintaining their stability, hot pressing is the most effective of the presented sintering methods.

show abstract

“…Classical ceramic technology is simple and relatively cheap, but the obtained ceramic materials have an average set of parameters with high dielectric loss values. Other known and used sintering methods that change the properties of ceramics include the HP method (hot pressing method) [2], microwave sintering [1,3], spark plasma sintering (SPS) [2,[4][5][6], the cold sintering process (CSP) [7,8], and flash sintering [9]. The SPS method is also known as the field-assisted sintering technique and uses uniaxial pressure and pulses of electric current (high intensity and low voltage) [6,10,11].…”

Section: Introductionmentioning

confidence: 99%

Properties of PBZTS Ferroelectric Ceramics Obtained Using Spark Plasma Sintering

Brzezińska,

Bochenek,

Niemiec

et al. 2023

Materials

View full text Add to dashboard Cite

In this paper, spark plasma sintering was used to obtain and investigate (Pb0.97Ba0.03)(Zr0.98Ti0.02)1−xSnxO3 (PBZTS) ceramic materials for x = 0, 0.02, 0.04, 0.06, and 0.08. Crystal structure, microstructure, dielectric and ferroelectric properties, and electrical conductivity tests of a series of samples were carried out. The SPS sintering method ensures favorable dielectric and ferroelectric properties of PBZTS ceramic materials. X-ray studies have shown that the material has a perovskite structure. The samples have a densely packed material structure with properly crystallized grains. The fine-grained microstructure of the PZBZTS material with high grain homogeneity allows the application of higher electric fields. Ceramic samples obtained by the SPS method have higher density values than samples obtained by the classical method (FS). The permittivity at room temperature is in the range of 245–282, while at the phase transition temperature is in the range of 10,259–12,221. At room temperature, dielectric loss factor values range from 0.006 to 0.036. The hysteresis loops of PBZTS ceramics have a shape typical for ferroelectric hard materials, and the remnant polarization values range from 0.32 to 0.39 µC/cm2. The activation energy Ea values of the PBZTS samples result mainly from the presence of oxygen vacancies. The PZT material doped with Ba and Sn and sintered via the SPS method has favorable physical parameters for applications in modern devices such as actuators or pulse capacitors.

show abstract

Comparative study of the hard and soft PZT-based ceramics sintered by various methods

Cited by 18 publications

References 15 publications

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO₄ ²⁻

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO₄ ²⁻

Influence of the Sintering Method on the Properties of a Multiferroic Ceramic Composite Based on PZT-Type Ferroelectric Material and Ni-Zn Ferrite

Properties of PBZTS Ferroelectric Ceramics Obtained Using Spark Plasma Sintering

Contact Info

Product

Resources

About

Comparative study of the hard and soft PZT-based ceramics sintered by various methods

Cited by 18 publications

References 15 publications

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO4 2−

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO4 2−

Influence of the Sintering Method on the Properties of a Multiferroic Ceramic Composite Based on PZT-Type Ferroelectric Material and Ni-Zn Ferrite

Properties of PBZTS Ferroelectric Ceramics Obtained Using Spark Plasma Sintering

Contact Info

Product

Resources

About

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO₄ ²⁻

Improving Chemical Mechanical Polishing Efficiency of PZT with Less than 100 ppm SO₄ ²⁻