Comparative Study on Modeling Approaches of V-Shaped MEMS Temperature Sensors

Cohen, Yehonatan; Ya’akobovitz, Assaf

doi:10.1109/tim.2018.2879144

Cited by 5 publications

(6 citation statements)

References 39 publications

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“…where δ f is calculated from (12), while f (δ r ) is calculated from (1) when there is no buckling and from (7) in case of buckling. δ f and f (δ r ) are calculated considering V = V max .…”

Section: Task Feasibility Measurementioning

confidence: 99%

“…The output force and deflection are generally controlled electro-thermally using Joule's heating. Other heating modes are also possible, such as convection with a proximity parallel layer [3], using light or directive laser [4,5], or with the environment temperature [6,7] (for temperature sensing).…”

mentioning

confidence: 99%

“…The expressions governing the variation of the actuator output force f with the deflection δ is given in (1) for the case of no-buckling and in (7) for case of buckling. Both f − δ governing expressions in (1) and (7) apply in the range of actuation between zero deflection position (δ = 0) and free load position due to heating (δ = δ f ).…”

mentioning

confidence: 99%

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Task feasibility of V shape electrothermal actuators

2020

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This paper investigates the modeling, design, and task feasibility of V shape electrothermal actuators. In the first part, the force-deflection governing expressions are derived and the actuator performance is analyzed based on these expressions. The influence of the actuator dimensions and properties on its performance is clarified. In the second part, the task feasibility is further investigated. A performance measure is proposed for evaluating the capacity of the actuator to accomplish required tasks depending on the application. This measure is used for finding a feasible configuration and optimized design. A case study is finally presented, showing very good agreement between analytical model and finite element simulations, and demonstrating the robustness of the task feasibility measure.

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Section: Task Feasibility Measurementioning

confidence: 99%

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confidence: 99%

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Task feasibility of V shape electrothermal actuators

2020

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“…However, modeling them is quite complex because electricity, thermology, and elasticity are coupled in this problem. 14 Early work on the design and analysis of V-shaped actuators was done by Que et al, who designed both single and cascaded structures and presented an analytical model to analyze their displacement under a uniform temperature change. 15 Other such models were introduced in References 16,17, both of which analyzed the relationship between the deflection and the average temperature change without taking heat distribution induced by the electrothermal effect into consideration.…”

Section: Introductionmentioning

confidence: 99%

“…With the application of V‐shaped actuators growing fast, an accurate and easy‐to‐implement model is required to estimate the behavior of such devices. However, modeling them is quite complex because electricity, thermology, and elasticity are coupled in this problem 14 . Early work on the design and analysis of V‐shaped actuators was done by Que et al, who designed both single and cascaded structures and presented an analytical model to analyze their displacement under a uniform temperature change 15 .…”

Section: Introductionmentioning

confidence: 99%

An efficient electro‐thermo‐mechanical model for the analysis of V‐shaped thermal actuator connected with driven structures

Zhao

Zhou

Meng

et al. 2020

Int J Numerical Modelling

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V-shaped thermal actuators are popular in many types of microelectromechanical systems' (MEMS) devices. In the rapidly growing applications of V-shaped thermal actuators, there are usually complex driven structures, in which the Joule heat may transfer, connecting to the V-beams. However, their influence on the temperature distribution has not been included in existing analytical models. An electro-thermo-mechanical model is presented to tackle this problem. By dividing the thermal actuator into a set of short beams, a two-dimensional network is constructed. Besides, the driven structure can be analyzed as an equivalent circuit of thermal resistances. Then, circuit-like node equations can be acquired for this heat flow network to solve the heat distribution. On this basis, the heat expansions of the shuttle beam are taken into consideration to predict the displacements and forces under different driving voltage and ambient temperature. Taking a test structure as an example, this model is proved to be accurate by comparing the results with finite element analysis. This model can be served as an effective analysis technique for MEMS devices containing V-shaped thermal actuators.

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