“…A Si-based FET hydrogen sensor, produced by a MOS structure with a catalytic metal, was first reported by Lundström et al [7]. Recently, different semiconductor materials, such as InP [8,9], GaAs [10,11], GaP [12], InGaP [13], AlGaAs [14], SiC [15,16], GaN [17,18], and AlGaN [19,20], have also been applied to hydrogen sensing. In the case of semiconductortype hydrogen sensors, the reaction on the catalytic metal surface or adsorption at the metal-oxide (or metal-semiconductor) interface induces concentration-dependent changes of the electrical properties.…”