Comparison between Ar+CH4 cathode and anode coupling chemical vapor depositions of hydrogenated amorphous carbon films

Hwang, Sung Hwa; Iwamoto, Ryosuke; Okumura, Takamasa; Kamataki, Kunihiro; Itagaki, Naho; Koga, Kazunori; Nakatani, Tatsuyuki; Shiratani, Masaharu

doi:10.1016/j.tsf.2021.138701

Cited by 6 publications

(3 citation statements)

References 56 publications

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“…Coating the surface of metallic materials using cyclic voltammetry increased the penetration process of the deposited carbon on the surface of the metal substrate as well as the adhesion between coating and substrate [24,[30][31][32][33]. The carbon film prepared by electrochemical methods can effectively eliminate the interfacial impedance between the Ni substrate and the polymer film, solving the inherent problem of all-solid-state electrodes [24,25,34]. The carbon film prepared by this method is a graphite carbon film, which has many excellent properties in addition to its application as an electrode substrate.…”

Section: Sem Analysesmentioning

confidence: 99%

Fabrication of an All-Solid-State Carbonate Ion-Selective Electrode with Carbon Film as Transducer and Its Preliminary Application in Deep-Sea Hydrothermal Field Exploration

Zhang

et al. 2021

Chemosensors

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Real-time measurements of carbonate ion concentrations in the ocean are critical to advancing marine environmental monitoring and research into deep-sea hydrothermal activity. Herein, we report the first example of deep-sea hydrothermal field exploration using a carbonate ion-selective electrode (ISE). The novel carbonate ISE was composed of a Ni wire as substrate, carbon film as transducers and carbonate-selective membrane layers. This paper describes the preparation process of the electrode and characterises its performance via scanning electron microscopy (SEM) and electrochemical analysis. The detection limit of the electrode for CO32− is 2.821 × 10−6 mol/L, the linear response range is 1.0 × 10−5–1.0 × 10−1 mol/L and the Nernst slope was −30.4 mV/decade. In April 2021, the carbonate ISE was mounted on multi-parameter sensors with pH and Eh (redox) electrodes for the search of hydrothermal activity at the Southwest Indian Ridge. The simultaneous potential anomalies appeared at this carbonate electrode with the pH and Eh electrodes when passing through the hydrothermal field. The study of the hydrothermal field was supported by the in situ camera video and the sulphide samples. Additionally, the carbonate electrode provides enhanced information of water chemistry for the study of the hydrothermal field.

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Section: Sem Analysesmentioning

confidence: 99%

Fabrication of an All-Solid-State Carbonate Ion-Selective Electrode with Carbon Film as Transducer and Its Preliminary Application in Deep-Sea Hydrothermal Field Exploration

Zhang

et al. 2021

Chemosensors

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“…9) IBE and ion flux are crucial in determining the properties of a-C:H films, as they affect the a-C:H structure, bonding configuration (sp 3 /sp 2 faction), and chemical composition (H content). [10][11][12][13][14][15][16] The ion bombardments create dangling bonds on the film surface, and the ions penetrating the film bulk lead to the desorption of H atoms and the denaturation from sp 2 to sp 3 by sub-plantation and relaxation mechanisms. 10,16) However, independent control of IBE and ion flux cannot be achieved in conventional single-frequency discharges because both parameters are typically controlled by applied voltage amplitude.…”

Section: Introductionmentioning

confidence: 99%

Deposition of hydrogenated amorphous carbon films by CH₄/Ar capacitively coupled plasma using tailored voltage waveform discharges

Otaka,

Otomo,

Ikeda

et al. 2024

Jpn. J. Appl. Phys.

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We investigated effects of tailored voltage waveform (TVWs) discharges on deposition of hydrogenated amorphous carbon (a-C:H) films in CH4/Ar capacitively coupled plasma. TVWs discharges employ two driving radio frequencies (13.56 MHz and 27.12 MHz) and control their phase shift to independently regulate ion bombardment energy (IBE) and ion flux. In this study, a-C:H films were deposited by changing DC-self bias with phase shift and constant applied voltage peak-to-peak. Additionally, we investigated phase resolved optical emission spectroscopy (PROES) for plasma characterization. As a result, plasma enhanced chemical vapor deposition (PECVD) for a-C:H films using TVWs discharges realize control of film properties such as mass density, sp3 fraction and H content, with keeping deposition rate constant. Thus, it is suggested that TVWs discharges realize the independent control of IBE and ion flux with high accuracy, highlighting its utility in a-C:H film depositions.

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“…One potential technique is thermal spray coatings using a stream of feedstocks which is dependent on the thermal expansion gradient between the top coat and the substrates [11,12]. Another promising method is physical vapor deposition (PVD) which provides various coating layers because it has few restrictions on source materials and the formation of multi-layers [13][14][15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Influence of Heat Treatment on Corrosion Resistance of Sn/Mg Films Formed by PVD Method on Hot-Dip Galvanized Steel

Hwang

Lee

2023

Coatings

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Double layers composed of Sn and Mg, each 0.8 μm thick, were fabricated on a hot-dip galvanized steel (8.4 μm) sheet using DC magnetron sputtering and post-annealing processes. With an increase in temperature, the surface morphologies were agglomerated with each other. Additionally, Sn/Mg mixture sites, including an intermetallic compound of Mg2Sn, were formed at 190 °C and locally clustered at 220 °C. In the salt-spray test, the corrosion resistance of the Sn/Mg film prepared at 190 °C was 960 h, which is longer than that at non-heat for 528 h or 220 °C for 480 h. In the polarization test, the Sn/Mg film formed at 190 °C displayed a lower corrosion current density of 1.07 μA/cm2 and potential of 1.62 V/SSCE than those at non-heat or 220 °C.

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Comparison between Ar+CH4 cathode and anode coupling chemical vapor depositions of hydrogenated amorphous carbon films

Cited by 6 publications

References 56 publications

Fabrication of an All-Solid-State Carbonate Ion-Selective Electrode with Carbon Film as Transducer and Its Preliminary Application in Deep-Sea Hydrothermal Field Exploration

Fabrication of an All-Solid-State Carbonate Ion-Selective Electrode with Carbon Film as Transducer and Its Preliminary Application in Deep-Sea Hydrothermal Field Exploration

Deposition of hydrogenated amorphous carbon films by CH₄/Ar capacitively coupled plasma using tailored voltage waveform discharges

Influence of Heat Treatment on Corrosion Resistance of Sn/Mg Films Formed by PVD Method on Hot-Dip Galvanized Steel

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Comparison between Ar+CH4 cathode and anode coupling chemical vapor depositions of hydrogenated amorphous carbon films

Cited by 6 publications

References 56 publications

Fabrication of an All-Solid-State Carbonate Ion-Selective Electrode with Carbon Film as Transducer and Its Preliminary Application in Deep-Sea Hydrothermal Field Exploration

Fabrication of an All-Solid-State Carbonate Ion-Selective Electrode with Carbon Film as Transducer and Its Preliminary Application in Deep-Sea Hydrothermal Field Exploration

Deposition of hydrogenated amorphous carbon films by CH4/Ar capacitively coupled plasma using tailored voltage waveform discharges

Influence of Heat Treatment on Corrosion Resistance of Sn/Mg Films Formed by PVD Method on Hot-Dip Galvanized Steel

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Deposition of hydrogenated amorphous carbon films by CH₄/Ar capacitively coupled plasma using tailored voltage waveform discharges