The behaviour of oxide and interface defects in n-channel power vertical
double-diffused metal-oxide-semiconductor field-effect transistors, firstly
degraded by the gamma-irradiation and electric field and subsequently
recovered and annealed, is presented. By analyzing the transfer
characteristic shifts, the changes of threshold voltage and underlying
changes of gate oxide and interface trap densities during the stress
(recovery, annealing) of investigated devices, it is shown that these two
types of stress influence differently on the gate oxide and the SiO2-Si
interface. [Projekat Ministarstva nauke Republike Srbije, br. OI171026]