2013
DOI: 10.1108/17579861311321735
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Comparison between positive and negative bias stress on N‐channel VDMOSFET transistors

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“…1 and 2, re spec tively. As the thresh old volt age behav iour is caused by the de fects formed in the gate oxide and at the SiO 2 -Si in ter face dur ing the stress/anneal ing [23][24][25], the ob served dif fer ences point out to the con clu sion that the elec tri cal stress and the ir ra di ation prob a bly ini ti ate dif fer ent mech a nisms of de fects for ma tion in the gate ox ide and at the in ter face. This can be con firmed by fig.…”
Section: Re Sults and Discussionmentioning
confidence: 99%
“…1 and 2, re spec tively. As the thresh old volt age behav iour is caused by the de fects formed in the gate oxide and at the SiO 2 -Si in ter face dur ing the stress/anneal ing [23][24][25], the ob served dif fer ences point out to the con clu sion that the elec tri cal stress and the ir ra di ation prob a bly ini ti ate dif fer ent mech a nisms of de fects for ma tion in the gate ox ide and at the in ter face. This can be con firmed by fig.…”
Section: Re Sults and Discussionmentioning
confidence: 99%