An analysis of the metastability of silicon-on-insulator (SOI) complementary metal-oxide± silicon (CMOS) latches is presented, using partially-depleted SOI devices with various body-connection topologies and an unbu ered latch. The metastability window, resolution time and time interval between the clock edge and the time t meta are evaluated as functions of power supply and the type of body-connection topology. Simulations using SOISPICE show improved metastability behaviour for SOI speci® c body-connection topologies.