Some aspects for the application of Laser Ablation-Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) are considered and discussed from the viewpoint of the rapid analysis of oxide inclusions in metal samples. The inclusion characteristics in Fe-10% Ni alloy samples such as number, size and particle size distribution obtained by LA-ICP-MS method are compared with those from three-dimensional observation of particles on a film filter after electrolytic extraction. Though some limits had to be considered regarding to the content of soluble elements, the number and dispersion of analyzed inclusions in metal matrix, it was found that the LA-ICP-MS technique can be successfully applied for the rapid analysis of oxide inclusions containing Al2O3, MgO and others.