Comparison of MEMS PZT Cantilevers Based on $d_{31}$  and $d_{33}$ Modes for Vibration Energy Harvesting

Kim, Seon-Bae; Park, Hyejin; Kim, Seung Hyun; Wikle, Howard C.; Park, Jung Hyun; Kim, Dong-Joo

doi:10.1109/jmems.2012.2213069

Cited by 135 publications

(67 citation statements)

References 34 publications

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“…Among the reported vibrational energy harvesters using electromagnetic [5]- [8], electrostatic [9]- [11] and piezoelectric [12]- [15] energy conversion transducers, most if not all of the devices have been characterized by using swept-sine vibration shaker at the laboratory. Thus they may focus on the power generation and vibration behavior of linear oscillators in response to harmonic excitations without considering the irregular vibration frequencies occurring in practical applications.…”

Section: Investigation Of the Nonlinear Electromagneticmentioning

confidence: 99%

Investigation of the Nonlinear Electromagnetic Energy Harvesters From Hand Shaking

et al. 2015

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Abstract-This paper presents the design, modeling, and optimization of an electromagnetic energy harvesting (EMEH) device with various tube length and winding coil width. The nonlinear magnetic-spring configuration is employed for generating sufficient power from hand shaking of irregular and low-frequency vibrations. Based on the modeling and simulation, longer tube length of the EMEH device results in lower resonant frequency and stronger nonlinearity of the system and thus is more efficient for low-frequency harvesting. From the hand shaking test, it is found that a longer tube length and a shorter winding coil width could induce a higher power generation. The optimized device of tube length of 66 mm and winding coil width of 10 mm has achieved maximum power outputs of 568.66 µW at the hand shaking acceleration of 1 g and frequency of 6.7 Hz, which corresponds to the power density of 90.67 µW/cm 3 . Further improvement of the device has been achieved by increasing the coil length to 40 m. This device provides maximum power outputs of 825.36 µW at the hand shaking acceleration of 1.56 g and frequency of 6.7 Hz. This paper demonstrates a feasible design of nonlinear EMEH device with impressive output performance from hand shaking.Index Terms-Electromagnetic energy harvester (EMEH), nonlinear, magnetic-spring, hand shaking.

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Section: Investigation Of the Nonlinear Electromagneticmentioning

confidence: 99%

Investigation of the Nonlinear Electromagnetic Energy Harvesters From Hand Shaking

et al. 2015

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“…solid solutions between two compounds, have been extensively investigated for use in electromechanical applications. [6][7][8][9][10] Most of these alloys have large miscibility gaps, which makes them less appealing for applications where mechanical stability is an important figure of merit. The presence of miscibility gaps is not particularly restrictive, since current non-equilibrium processing techniques allow for fabricating pseudo-binary alloys in which one can seek a given functionality by, e.g., changing composition (often through the miscibility gaps) so as to optimize piezoelectric coefficients, stiffness, electromechanical coupling constants, or electronic properties.…”

Section: Introductionmentioning

confidence: 99%

Tuning the piezoelectric and mechanical properties of the AlN system via alloying with YN and BN

Manna

Brennecka

Stevanović

et al. 2017

Journal of Applied Physics

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Recent advances in microelectromechanical systems often require multifunctional materials, which are designed so as to optimize more than one property. Using density functional theory calculations for alloyed nitride systems, we illustrate how co-alloying a piezoelectric material (AlN) with different nitrides helps tune both its piezoelectric and mechanical properties simultaneously. Wurtzite AlN-YN alloys display increased piezoelectric response with YN concentration, accompanied by mechanical softening along the crystallographic c direction. Both effects increase the electromechanical coupling coefficients relevant for transducers and actuators. Resonator applications, however, require superior stiffness, thus leading to the need to decouple the increased piezoelectric response from a softened lattice.We show that co-alloying of AlN with YN and BN results in improved elastic properties while retaining some of the piezoelectric enhancements from YN alloying. This finding may lead to new avenues for tuning the design properties of piezoelectrics through composition-property maps.

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“…Thus, researchers can utilize the different piezoelectric modes to design PEH by interdigital electrode (IDE). Hagood and Wilkie et al [57,58] fabricated the d 33 mode PEH with IDE, and higher voltage can be generated from Fig. 28.…”

Section: Vibration Mode Of Pehmentioning

confidence: 99%

“…Kim et al [58] investigated the output power of d 31 and d 33 mode in the same dimensions in a cantilever structure PEHs. The result showed that the output power of d 33 mode can be larger than that of d 31 mode PEH when the finger width is decreased to 2 μm and finger spacing is between 8 and 20 μm, which is strongly related to the dimensions of IDE.…”

Section: Vibration Mode Of Pehmentioning

confidence: 99%

Recent progress on piezoelectric energy harvesting: structures and materials

Jia-dong

Liu

et al. 2018

Adv Compos Hybrid Mater

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With the rapid development of advanced technology, piezoelectric energy harvesting (PEH) with the advantage of simple structure, polluted relatively free, easily minimization, and integration has been used to collect the extensive mechanical energy in our living environment holding great promise to power the self-sustainable system and portable electronics. In this paper, attempts have been made to review the progress of piezoelectric materials and devices used for energy harvesting. The review focused on three parts: structure of piezoelectric devices (cantilever, cymbal, and stacks); theoretical mode, including vibration mode (d 31 and d 33 ) and its responding theories of different devices; and piezoelectric materials, among which the electric performance of Pb(ZrTi)O 3 -based, lead-free-based, and composites applied in bulk/micro/nano-PEH devices were introduced in details. It is suggested that a new structure of PEH should be designed by combining advantages of cantilever, stacks, and cymbal structure. Besides, high d 33 × g 33 value and low ε of piezoelectric materials are required in order to generate high electric output power for bulk/micro/nano-PEH. Additionally, lead-free piezoelectric ceramics is a candidate for manufacturing PEH devices, and nano-composite materials should be developed to further improve the flexibility of piezoelectric materials.

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Comparison of MEMS PZT Cantilevers Based on $d_{31}$ and $d_{33}$ Modes for Vibration Energy Harvesting

Cited by 135 publications

References 34 publications

Investigation of the Nonlinear Electromagnetic Energy Harvesters From Hand Shaking

Investigation of the Nonlinear Electromagnetic Energy Harvesters From Hand Shaking

Tuning the piezoelectric and mechanical properties of the AlN system via alloying with YN and BN

Recent progress on piezoelectric energy harvesting: structures and materials

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