Comparison of strain gage and interferometric detection for measurement and control of piezoelectric actuators

Colchero, Luis; Colchero, J.; Gomez-Herrero, Julio; Prieto, Emilio; Baró, A. M.; Huang, Wenhao

doi:10.1016/s1044-5803(02)00191-2

Cited by 9 publications

(3 citation statements)

References 10 publications

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“…Optical interferometers have previously been used for piezoelectric characterization, determining piezoelectric displacement, hysteresis, nonlinearity, and creep, for example [8][9][10]. Of particular interest are fiber optic interferometric displacement sensors, which have a number of desirable properties compared to mechanical, electrical, and free-space optical interferometric displacement sensors.…”

Section: Introductionmentioning

confidence: 99%

A fiber optic, Fabry–Perot strain gauge calibrator

Abdi¹,

Kost²

2007

Smart Mater. Struct.

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In this paper, we describe a compact, non-destructive calibration setup using a fiber optic Fabry–Perot interferometric (FOFPI) displacement sensor and a circular, mono-morphic piezoelectric plate actuator. The piezoelectric actuator strains the sensor under calibration, and the FOFPI measures the resulting displacement and strain. Using a linear fitting equation that relates the fractional change in sensor output and the measured strain, the strain gauge factor (SGF) is determined. For demonstration purposes, the setup is used to determine the strain gauge factor of a resistive strain gauge (RSG). The measured SGF of the RSG was found to be within 2% of the manufacturer’s stated value.

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Section: Introductionmentioning

confidence: 99%

A fiber optic, Fabry–Perot strain gauge calibrator

Abdi¹,

Kost²

2007

Smart Mater. Struct.

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“…But unfortunately piezoelectric ceramic is known to exhibit strong non-linearity, hysteresis, creep, aging, dynamic range, and drift 3,4,5,6 . For many applications, these effects are disturbing but do not represent essential limitations for the SPM.…”

Section: Introductionmentioning

confidence: 99%

Open-loop measurement of data sampling point for SPM

Wang

Zhao

2006

SPIE Proceedings

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SPM (Scanning Probe Microscope) provides "three-dimensional images" with nanometer level resolution, and some of them can be used as metrology tools. However, SPM's images are commonly distorted by non-ideal properties of SPM's piezoelectric scanner, which reduces metrological accuracy and data repeatability. In order to eliminate this limit, an "open-loop sampling" method is presented. In this method, the positional values of sampling points in all three directions on the surface of the sample are measured by the position sensor and recorded in SPM's image file, which is used to replace the image file from a conventional SPM. Because the positions in X and Y directions are measured at the same time of sampling height information in Z direction, the image distortion caused by scanner locating error can be reduced by proper image processing algorithm.

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“…Since the development of the SPM different techniques have been investigated [2,3] to determine the lateral and vertical position of the probe. The ability of the capacitive positioning measurement to achieve sub-nanometre resolution in combination with an absolute position signal over the whole positioning range promises to be a reliable technique for closed-loop positioning control for a scanning microscope [4].…”

Section: Introductionmentioning

confidence: 99%

Calibration of a scanning probe microscope by the use of an interference–holographic position measurement system

Feige

Balk

2003

Meas. Sci. Technol.

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Nonlinearities and hysteretic behaviours of piezoelectric actuators used in scanning probe microscopes (SPM) lead to uncertain position determinations of the moving probe in all directions. Therefore, probes must be controlled with nanometre resolution and the three dimensions must be traceable to the unit of length for metrological investigations. Many positioning systems exist but only a few are implementable into SPM or have unsatisfying dynamic properties as well as Abbe errors.A hybrid implementation of a capacitive and a novel three-dimensional interferometric position measurement system has been developed to overcome these problems. The theory and technique of this holographic interferometry are given and the characteristics of the components used for implementation in the final set-up are analysed. A realized SPM head including this technique, in addition to a capacitive position system, as well as its properties are discussed.

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Comparison of strain gage and interferometric detection for measurement and control of piezoelectric actuators

Cited by 9 publications

References 10 publications

A fiber optic, Fabry–Perot strain gauge calibrator

A fiber optic, Fabry–Perot strain gauge calibrator

Open-loop measurement of data sampling point for SPM

Calibration of a scanning probe microscope by the use of an interference–holographic position measurement system

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