Calibration of a scanning probe microscope by the use of an interference–holographic position measurement system

Abstract

Nonlinearities and hysteretic behaviours of piezoelectric actuators used in scanning probe microscopes (SPM) lead to uncertain position determinations of the moving probe in all directions. Therefore, probes must be controlled with nanometre resolution and the three dimensions must be traceable to the unit of length for metrological investigations. Many positioning systems exist but only a few are implementable into SPM or have unsatisfying dynamic properties as well as Abbe errors.A hybrid implementation of a capacitive and a novel three-dimensional interferometric position measurement system has been developed to overcome these problems. The theory and technique of this holographic interferometry are given and the characteristics of the components used for implementation in the final set-up are analysed. A realized SPM head including this technique, in addition to a capacitive position system, as well as its properties are discussed.

Scanning near-field photon emission microscopy

“…1 is modified from an Atomic Force Microscope (AFM) system with a large sample stage [17]. Scanning of the probe is done with a piezo scanner, which contains XY nanopositioning stage with a scan range 60 x 60 m and resolution of 0.3 nm.…”

Use of cylindrical artefacts for AFM vertical calibration

“…A complete model for the description of an AFM measuring system can be achieved using a Taylor expansion, which describes the physical z-coordinate of a surface as a function of the uncorrected vertical and horizontal positions (respectively x and z ) measured by the scanning instrument [3,4]. According to this model, the real physical position z approximated by the Taylor series to the third order in z and x , is:…”

“…Using the same principle described in [4], data sets collected from the two fibres were fitted through a fourth-order polynomial function (3):…”

“…Some metrological atomic force microscopes (AFMs) have established traceability, by using, for example, built-in laser interferometers on the axes. However, most instruments need calibration operations on standards [1][2][3][4].…”

Calibrated measurement of the behaviour of mechanical junctions from micrometre to subnanometre scale: the friction force scanner

“…Most instruments balance the net force experienced at a junction by strain forces resulting from the deformation of flexures. Measurement of displacement [12], together with calibration of the flexural response, makes it then possible to evaluate the net force at the junction.…”