Compensation, tuning, and trimming of MEMS resonators

Ayazi, Farrokh; Tabrizian, Roozbeh; Sorenson, Logan

doi:10.1109/fcs.2012.6243717

Cited by 19 publications

(4 citation statements)

References 36 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This effect is attributed to the major differences among the physical properties of the quartz and the soot (e.g. ρ qz ~ 2.65 g cm −3 , while ρ soot ~ 0.04-0.07 g cm −3 [33,38]), likely leading to different thermal expansion coefficients and subsequent partial thermal compensation [39]. Second, the coating deforms the shape of the TFC from linear to quasilinear (for the chosen temperature range) with random upward and downward signal drifts most probably caused by stress relaxation phenomena (e.g.…”

Section: Dynamic Tfc Of the Soot Coated Qcmsmentioning

confidence: 99%

Delayed condensation and frost formation on superhydrophobic carbon soot coatings by controlling the presence of hydrophilic active sites

Esmeryan

Castano

Mohammadi

et al. 2018

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

Condensation frosting is an undesired natural phenomenon that could be impeded efficiently using appropriate wettability and morphologically patterned surfaces. The icephobic properties of carbon soot and the fabrication scalability of its synthesis method are a good foundation for anti-frosting applications; however, the fundamentals of frost growth and spreading on sooted surfaces have not been examined yet. In this study, we investigate the anti-frosting performance of three groups of superhydrophobic soot coatings by means of 16 MHz quartz crystal microbalances (QCMs). The analysis of the real-time sensor signal of each soot coated QCM pattern shows that frost formation and its propagation velocity depend on the quantity of oxygen functionalities and structural defects in the material. In turn, the reduction of both parameters shifts the onset of frost growth to temperatures below −20 °C, whereas the interdroplet ice bridging is slowed by a factor of four. Moreover, high-resolution scanning electron micrographs of the samples imply delamination upon defrosting of the soot with spherical-like morphology via polar interactions driven mechanism. These results reveal an opportunity for control of frost incipiency on sooted surfaces by adjusting the synthesis conditions and depositing soot coatings with as low as possible content of hydrophilic active sites.

show abstract

Section: Dynamic Tfc Of the Soot Coated Qcmsmentioning

confidence: 99%

Delayed condensation and frost formation on superhydrophobic carbon soot coatings by controlling the presence of hydrophilic active sites

Esmeryan

Castano

Mohammadi

et al. 2018

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…Once deposited onto the quartz surface they will cause a change in the shape of the TFC. Recently, the expansion coefficient differences have been used for temperature compensation of MEMS resonators [25]. Since, also in this study, each HMDSO film thickness was expected to introduce a different temperature sensitivity of the QCM, for more comprehensive comparison of the overall temperature stability of each device, we introduced a thermal sensitivity criterion called "100 K temperature stability" (100 KTS).…”

Section: Temperature Stability Criterionmentioning

confidence: 99%

Temperature behavior of solid polymer film coated quartz crystal microbalance for sensor applications

Esmeryan¹,

Avramov²,

Radeva³

2015

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

“…However, they have had limited success in replacing their quartz counterparts in high-end applications; the bottleneck being the lack of temperature stability and frequency scalability with feasible motional impedance, especially at higher frequencies in the VHF range. In order to overcome the temperature variations, many methods are used 1 , some of which include using compound materials 2 and using highly doped silicon substrates 3,4 . Using compound materials usually involves complicated fabrications process, leading to higher cost and lower manufacturability.…”

Section: Introductionmentioning

confidence: 99%

Low motional impedance distributed Lamé mode resonators for high frequency timing applications

et al. 2020

Self Cite

View full text Add to dashboard Cite

This paper presents a novel high-Q silicon distributed Lamé mode resonator (DLR) for VHF timing reference applications. The DLR employs the nature of shear wave propagation to enable a cascade of small square Lamé modes in beam or frame configurations with increased transduction area. Combined with high efficiency nano-gap capacitive transduction, it enables low motional impedances while scaling the frequency to VHF range. The DLR designs are robust against common process variations and demonstrate high manufacturability across different silicon substrates and process specifications. Fabricated DLRs in beam and frame configurations demonstrate high performance scalability with high Q-factors ranging from 50 to 250 k, motional impedances <1 kΩ, and high-temperature frequency turnover points >90 °C in the VHF range, and are fabricated using a wafer-level-packaged HARPSS process. Packaged devices show excellent robustness against temperature cycling, device thinning, and aging effects, which makes them a great candidate for stable high frequency references in size-sensitive and power-sensitive 5 G and other IoT applications.

show abstract

Compensation, tuning, and trimming of MEMS resonators

Cited by 19 publications

References 36 publications

Delayed condensation and frost formation on superhydrophobic carbon soot coatings by controlling the presence of hydrophilic active sites

Delayed condensation and frost formation on superhydrophobic carbon soot coatings by controlling the presence of hydrophilic active sites

Temperature behavior of solid polymer film coated quartz crystal microbalance for sensor applications

Low motional impedance distributed Lamé mode resonators for high frequency timing applications

Contact Info

Product

Resources

About