Achieving
precise control of the Schottky barrier height and minimizing
Fermi-level pinning effect are crucial factors in designing high-performance
Schottky barrier diodes. In this work, the effect of insertion of
HfO2 with different cycle numbers on forward current, capacitance,
and Ni/HfO2/β-Ga2O3 Schottky
barrier height is discussed. First, we observed that Schottky barrier
heights extracted from capacitance (ϕB
CV) were adjusted in the range of 0.54–1.33 eV, in which it
was increased by repeated atomic layer deposition cycles from two
to eight. In addition, with increasing HfO2 cycle numbers,
the Schottky barrier height became similar to an ideal value, which
means the Fermi pinning level effect is reduced. The effects of HfO2 cycle numbers on forward current and on the extracted Schottky
barrier height (ϕB
JV) were analyzed. We
observed that, the forward current was highly dependent on the HfO2 cycle number. Schottky barrier height (ϕB
JV) can be controlled easily in a wide range domain from
1.05 to 1.48 eV by increasing HfO2 cycle numbers.