International Technical Digest on Electron Devices
DOI: 10.1109/iedm.1990.237193
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Complete transient simulation of flash EEPROM devices

Abstract: Models to account for Fowler-Nordheim tunneling and hot electron injection through silicon dioxide as well as bandto-band tunneling in silicon have been incorporated into the 2-D device simulator HFJELDS(1J. These represent all the important physical mechanism which occur during the writing of flmh EEPROM devices. The physical models have been verified by comparison with flash EEPROM devices fabricated using a 1.0 pm technology where good agreement has been obtained.

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Cited by 14 publications
(4 citation statements)
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“…The Fowler–Nordheim tunneling in the HfO 2 interlayer current is defined as J normalF normalN = F α , normale E 2 .25em exp ( F β , e E ) where E specifies the oxide electric field and F α,e and F β,e are parameters. Furthermore, the considered geometrical meshing is presented in Figure .…”
Section: Methodsmentioning
confidence: 99%
“…The Fowler–Nordheim tunneling in the HfO 2 interlayer current is defined as J normalF normalN = F α , normale E 2 .25em exp ( F β , e E ) where E specifies the oxide electric field and F α,e and F β,e are parameters. Furthermore, the considered geometrical meshing is presented in Figure .…”
Section: Methodsmentioning
confidence: 99%
“…Polarization models were taken into account due to the strong spontaneous and piezoelectric polarization effects of nitride semiconductors [27]. The Fowler-Nordheim tunneling model was used to treat the tunnel effect [28]. Parallel electric field model was adopted to model velocity saturation effect and all calculations are based on the Fermi-Dirac statistics [29].…”
Section: Modelsmentioning
confidence: 99%
“…The off-state gate leakage can be ascribed to the tunnel current, as the strength of electric field of the device is high and the Ga 2 O 3 layer is sufficiently thin. This tunneling of carriers in the presence of high electric field is described by the well-known Fowler-Nordheim equation [28]:…”
Section: Effect Of Gate Work Functions On the Gate Breakdown And Off-...mentioning
confidence: 99%
“…5). Based on the model calculation 18) of tunneling current (Fig. 2), the ratio of hole current to electron current increases with large gate bias, and only the hole tunneling current can contribute the light emission.…”
mentioning
confidence: 99%