Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

Steinberg, Christian; Rumler, Maximilian; Runkel, Manuel; Papenheim, Marc; Wang, Si; Mayer, André; Becker, Marco; Rommel, Mathias; Scheer, Hella-Christin

doi:10.1016/j.mee.2017.01.009

Cited by 17 publications

(8 citation statements)

References 22 publications

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“…Bioinspired Packaging Design: Light Out‐Coupling : As mentioned above, light‐extraction is one of the remaining challenges in SSL . Recently, several groups have focused on the development of bio‐inspired nanostructured surfaces for light‐manipulation . These structures are heralded to promote progress on transparent dielectric structures for efficient light‐management in solar cells, LEDs, and displays, among others.…”

Section: Ileds Oleds and Lecs Based On Biological Materialsmentioning

confidence: 99%

Merging Biology and Solid‐State Lighting: Recent Advances in Light‐Emitting Diodes Based on Biological Materials

Fresta

Fernández-Luna

Coto

et al. 2018

Adv Funct Materials

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Solid-state lighting (SSL) is one of the biggest achievements of the 20 th century. It has completely changed our modern life with respect to general illumination (light-emitting diodes), flat devices and displays (organic lightemitting diodes), and small labeling systems (light-emitting electrochemical cells). Nowadays, it is however mandatory to make a transition toward green, sustainable, and equally performing lighting systems. In this regard, several groups have realized that the actual SSL technologies can easily and efficiently be improved by getting inspiration from how natural systems that manipulate light have been optimized over millennia. In addition, various natural and biocompatible materials with suitable properties for lighting applications have been used to replace expensive and unsustainable components of current lighting devices. Finally, SSL has also started to revolutionize the biomedical field with the achievement of efficient implantable lighting systems. Herein, the-state-of-art of (i) biological materials for lighting devices, (ii) bioinspired concepts for device designs, and (iii) implantable SSL technologies is summarized, highlighting the perspectives of these emerging fields.

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Section: Ileds Oleds and Lecs Based On Biological Materialsmentioning

confidence: 99%

Merging Biology and Solid‐State Lighting: Recent Advances in Light‐Emitting Diodes Based on Biological Materials

Fresta

Fernández-Luna

Coto

et al. 2018

Adv Funct Materials

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“…With an imprint stepper or with roll-to-roll NIL also large areas can be patterned three-dimensionally. For fabrication of three-dimensional structures hybrid structuring processes combining NIL and electron beam lithography [ 19 , 20 ] or NIL and photolithography [ 21 ], as well as multilayer nanoimprinting [ 22 ] to create hierarchical stamp masters for optical micro- and nanostructures have been recently demonstrated successfully. Even imprinting of complex three-dimensional nanomolds [ 23 ] was successfully demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

Taus

Prinz²,

Wanzenboeck

et al. 2021

Nanomaterials

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Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We have demonstrated different approaches allowing for the generation of sophisticated undercut T-shaped masters for NIL replication. With a layer-stack of phase transition material (PTM) on poly-Si, we have demonstrated the successful fabrication of a single layer undercut T-shaped structure. With a multilayer-stack of silicon oxide on silicon, we have shown the successful fabrication of a multilayer undercut T-shaped structures. For patterning optical lithography, electron beam lithography and nanoimprint lithography have been compared and have yielded structures from 10 µm down to 300 nm. The multilayer undercut T-shaped structures closely resemble the geometry of the surface of a Morpho butterfly, and may be used in future to replicate structural colors on artificial surfaces.

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“…An increasing number of advanced nanotechnological applications require highly repeatable fabrication of 'three-dimensional' devices with complex and precisely-controlled geometries. Depending on the targeted feature size and the complexity of the desired geometry, nanofabrication techniques, such as two-photon polymerization (TPP), 1 imprint lithography, [2][3][4][5] interference lithography, 6 3D molding, 7 electron beam lithography (EBL), [8][9][10] electron beam-induced deposition (EBID), [10][11][12][13] ion beam lithography (IBL), 14 or focused ion beam (FIB) 10,15,16 could be used to fabricate such 3D structures.…”

Section: Introductionmentioning

confidence: 99%

Quantitative mechanics of 3D printed nanopillars interacting with bacterial cells

et al. 2020

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Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques

Cited by 17 publications

References 22 publications

Merging Biology and Solid‐State Lighting: Recent Advances in Light‐Emitting Diodes Based on Biological Materials

Merging Biology and Solid‐State Lighting: Recent Advances in Light‐Emitting Diodes Based on Biological Materials

Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

Quantitative mechanics of 3D printed nanopillars interacting with bacterial cells

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