Complex aspherical singlet and doublet microoptics by grayscale 3D printing

Siegle, Leander; Ristok, Simon; Gießen, Harald

doi:10.1364/oe.480472

Cited by 26 publications

(20 citation statements)

References 51 publications

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“…S7), which translates to an RMS-to-sag ratio of 0.05%. These values are on par with the latest achievements with polymeric TPP-printed lenses ( 67 )—which report shape deviations of 0.1 to 0.5 μm and 4- to 15-nm RMS roughness—and within the specifications of the highest-quality commercial glass microlenses fabricated by reactive ion etching or ion exchange techniques, for which RMS/sag ratios of 0.01 to 0.09% are reported ( 66 ). Optical resolution measurements with a 1951 USAF–type resolution target under white light illumination demonstrated the excellent imaging performance of our microlenses.…”

Section: Optical Device Demonstrationsupporting

confidence: 76%

A sinterless, low-temperature route to 3D print nanoscale optical-grade glass

Bauer

Crook

Baldacchini

2023

Science

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Three-dimensional (3D) printing of silica glass is dominated by techniques that rely on traditional particle sintering. At the nanoscale, this limits their adoption within microsystem technology, which prevents technological breakthroughs. We introduce the sinterless, two-photon polymerization 3D printing of free-form fused silica nanostructures from a polyhedral oligomeric silsesquioxane (POSS) resin. Contrary to particle-loaded sacrificial binders, our POSS resin itself constitutes a continuous silicon-oxygen molecular network that forms transparent fused silica at only 650°C. This temperature is 500°C lower than the sintering temperatures for fusing discrete silica particles to a continuum, which brings silica 3D printing below the melting points of essential microsystem materials. Simultaneously, we achieve a fourfold resolution enhancement, which enables visible light nanophotonics. By demonstrating excellent optical quality, mechanical resilience, ease of processing, and coverable size scale, our material sets a benchmark for micro– and nano–3D printing of inorganic solids.

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Section: Optical Device Demonstrationsupporting

confidence: 76%

A sinterless, low-temperature route to 3D print nanoscale optical-grade glass

Bauer

Crook

Baldacchini

2023

Science

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“…The ultrafast laser 3D lithography keeps evolving in the employed technology [7] and applied material [8] wise and this in turn upgrades the options for production of micro-optics. For instance recently a grayscale 3D exposure approach was successfully validated for the efficient fabrication of complex architectures [9] or a technical solution for adjustment-free aligning of microoptics on both substrate sides [10]. A hybrid organic-inorganic SZ2080™ polymer was found to be well suited for such applications due to its glass-like characteristics [11] and the possibility to adjust its refractive index by controlling exposure dose [12] as well as enhance its laser-induced damage threshold by modifying its hybrid composition [13].…”

Section: Introductionmentioning

confidence: 99%

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

Galvanauskas¹,

Astrauskyte²,

Balcas³

et al. 2023

Preprint

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Laser Direct Writing (LDW) allows for the fabrication of complex free-form structures, particularly advantageous in micro-optic applications when used in conjunction with high-performance polymers, such as SZ2080™. Nonetheless, high-complexity and integrated micro-optical elements often manifest multiple interfaces, resulting in increased Fresnel reflection losses. While conventional physical vapour deposition processes are usually employed in the manufacture of high-precision optics, such methods are incapable of producing uniform coatings on micrometer scale complex free-form structures. Atomic Layer Deposition (ALD) is an alternative highly flexible coating process, able to coat intricate geometries down to nano-scale. We propose the use of LDW in conjunction with ALD in the production of highly efficient anti-reflective (AR) coated functional free-form sub-100 μm micro-optic elements - multi-layer platforms and triplet objectives. Low-temperature deposition of aluminum oxide and titanium oxide AR coating proved to be compatible with SZ2080™ polymer structures, as no loss of optical function was observed. In addition, a substantial increase in transmittance, up to 99.9% per interface, is seen. Such findings prove suitable for use in highly efficient compound micro-lens arrays, greatly integrated solutions, and low-loss photonic components making them readily available for Photonic Integrated Circuits (PICs).

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“…These devices include conventional [3] and Fresnel micro-lenses [4], holographic elements [5], polarisation controlled lens arrays [6], meta-optics [7] and multi-component systems [8], most notably, micro objectives [9], non-linear excitation imaging systems [10], as well as anti-reflective coated complex systems [11]. Furthermore, grayscale lithography was utilized to create step-free micro-lens systems either by using increased resolution [12] or variable laser fluence [13]. LDW method may also be used as an alternative for "classic" lithography, especially flexible maskless diffractive imaging systems [14].…”

Section: Introductionmentioning

confidence: 99%

Calcination-Enhanced Laser Induced Damage Threshold of 3D Micro-Optics Made with Laser Multi-Photon Lithography

Gailevičius¹,

Zvirblis²,

Galvanauskas³

et al. 2023

Preprint

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Laser Direct Writing (LDW), also known as 3D multi-photon laser lithography of resins, is a promising technique for fabricating complex free-form elements, including micro-optical functional components. Regular organic or hybrid (organic-inorganic) resins are often used, with latter exhibiting better optical characteristics, as well as having the option to be heat-treated into inorganic glass-like structures, particularly useful for resilient micro-optics. While this work is a continuation of SZ2080™ calcination development , the Laser-Induced Damage Threshold (LIDT) of such sol-gel-derived glass micro-structures, particularly those that undergo heat treatment, has not been well-characterized. In this pilot study, we investigated the LIDT using the Series-on-One (S-on-1) protocol of functional micro-lenses produced via LDW and subsequently calcinated. Our results demonstrate that the LIDT can be significantly increased, even multiple times, by this approach, thus enhancing the resilience and usefulness of these free-form micro-optics. This work represents the first investigation in terms of LIDT into the impact of calcination on LDW produced sol-gel-derived glass micro-structures, and provides important insights for the development of robust micro-optical devices.

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Complex aspherical singlet and doublet microoptics by grayscale 3D printing

Cited by 26 publications

References 51 publications

A sinterless, low-temperature route to 3D print nanoscale optical-grade glass

A sinterless, low-temperature route to 3D print nanoscale optical-grade glass

High-Transparency 3D Micro-Optics of Hybrid-Polymer SZ2080™ Made via Ultrafast Laser Nanolithography and Atomic Layer Deposition

Calcination-Enhanced Laser Induced Damage Threshold of 3D Micro-Optics Made with Laser Multi-Photon Lithography

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