We have studied the additive effects of AlN and MgO on L1 0 -FePt nanoparticles by co-sputtering FePt and AlN (or MgO) on MgO(100) substrates at 973 K. Good epitaxial growth of FePt was confirmed both for AlN and MgO. With the increase of the additive content, the long range order (LRO) of L1 0 phase appeared to increase for AlN, whereas it was suppressed for MgO. Morphological observation by addition of AlN, well-isolated FePt particles became to connect each other, and finally formed a maze-like structure. On the other hand, the morphology of FePt particles was hardly affected by addition of MgO.