Computer simulation of ion beam analysis: Possibilities and limitations

Abstract

Quantitative application of ion beam analysis methods, such as Rutherford backscattering, elastic recoil detection analysis, and nuclear reaction analysis, requires the use of computer simulation codes. The different types of available codes are presented, and their advantages and weaknesses with respect to underlying physics and computing time requirements are discussed. Differences between different codes of the same type are smaller by about one order of magnitude than the uncertainty of basic input data, especially stopping power and cross section data. Even very complex sample structures with elemental concentration variations with depth or laterally varying structures can be simulated quantitatively. Laterally inhomogeneous samples generally result in an ambiguity with depth profiles. The optimization of ion beam analysis measurements is discussed, and available tools are presented.

Global erosion and deposition patterns in JET with the ITER-like wall

“…For the derived depth profiles roughness effects are interpreted as depth profiles of elements. Nevertheless, it has been already shown that in case of ambiguities between depth profiles and surface roughness the total amounts of elements are still correct even if the depth profiles may not reflect the sample structure correctly [12]. Optical microscopy of cross-sections shows that there are thick deposits on top of the original tile surface, and that the films have a multi-layered structure with some of the layers being less than 1 μm thick [7].…”

Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

“…Computer codes are used for these calculations [51], and the best of these codes have been demonstrated accurate for RBS to at least 0.2% [46]. Computer codes for IBA have been comprehensively reviewed recently [52].…”

PIXE simulation: Models, methods and technologies

“…A few specialized codes concern PIXE simulation [15]- [19] specifically. These codes can model simple experimental geometries, such as targets consisting of layers, and impose limitations on the type of material samples they can deal with.…”

“…Functionality for PIXE simulation has been included in Geant4 relatively recently [19] and its use has been demonstrated in the experimental context: to the best of the authors' knowledge, this is the first generalpurpose Monte Carlo system providing tools for PIXE simulation.…”