A comprehensive study concerning the effect of different Al metal substrate purities (i.e. 99.5 versus 99.99%) on the properties of amorphous anodic barrier Al 2 O 3 is presented. The experimental findings demonstrate that only tiny variations in the purity of the employed Al materials lead to different oxide growth rate, surface charge, structural defect and impurities content. Below the ionic recombination potential characterized by Scanning Kelvin Probe Force Microscopy, an increase of the anodizing voltage leads to an improvement of the oxide barrier properties. The larger growth rate exhibited by the higher purity Al substrate however indicates the formation of highly disordered and inhomogeneous barrier oxides. A combination of photoelectrochemical and photoluminescence spectroscopies was used to characterize structural defect concentration and confirmed the presence of significantly higher concentrations in the oxide grown on the purer Al substrates. FT-IR and RBS/ERDA results indicate that H and C species are incorporated from the electrolyte solution in the barrier oxides with higher H amounts detected in the oxide grown on the purer Al substrate.