Confocal operation of a transmission electron microscope with two aberration correctors

Nellist, Peter D.; Behan, G.; Kirkland, Angus I.; Hetherington, C. J. D.

doi:10.1063/1.2356699

Cited by 104 publications

(63 citation statements)

References 16 publications

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“…There has been recent work in developing confocal microscopy using electrons (Frigo et al 2002;Zaluzec 2003;Nellist et al 2006;Takeguchi et al 2008), and in our laboratory we have been investigating the prospects for aberration-corrected scanning confocal electron microscopy (SCEM). In this section, we will review the recent theoretical work modelling SCEM imaging.…”

Section: Scanning Confocal Electron Microscopymentioning

confidence: 99%

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

Behan

Cosgriff

Kirkland

et al. 2009

Phil. Trans. R. Soc. A.

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The depth resolution for optical sectioning in the scanning transmission electron microscope is measured using the results of optical sectioning experiments of laterally extended objects. We show that the depth resolution depends on the numerical aperture of the objective lens as expected. We also find, however, that the depth resolution depends on the lateral extent of the object that is being imaged owing to a missing cone of information in the transfer function. We find that deconvolution methods generally have limited usefulness in this case, but that three-dimensional information can still be obtained with the aid of prior information for specific samples such as those consisting of supported nanoparticles. We go on to review how a confocal geometry may improve the depth resolution for extended objects. Finally, we present a review of recent work exploring the effect of dynamical diffraction in zone-axis-aligned crystals on the optical sectioning process.

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Section: Scanning Confocal Electron Microscopymentioning

confidence: 99%

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

Behan

Cosgriff

Kirkland

et al. 2009

Phil. Trans. R. Soc. A.

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“…A method for simultaneously tuning the optical elements required to form an aberrationcorrected focused probe illuminating the sample and aberration-corrected postspecimen optics subsequently focusing that probe to the detector plane has been previously described [28]. This involves using the electron Ronchigram to achieve tuned STEM optics, then switching the post-column optics to imaging mode such that a probe image is observed on a CCD camera.…”

Section: Using This Reduced Depth Of Focus To Retrieve 3d Informationmentioning

confidence: 99%

Applications of the Oxford-JEOL aberration-corrected electron microscope

Nellist

Kirkland

2010

Philosophical Magazine

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“…This progress is about to dramatically change with the deployment of electron microscopes having both probe and imaging aberration correction systems [3][4]. The correctors in these new instruments significantly increase the useable range of convergence (pre-specimen) and collection (post-specimen) angles and thus are poised to substantially improve the depth of field performance of SCEM.…”

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confidence: 99%

Scanning Confocal Electron Microscopy in a FEI Double Corrected Titan3 TEM/STEM

2009

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Since its first implementation [1][2], the application of the Scanning Confocal Electron Microscope (SCEM) to materials and life science problems has progressed steadily albeit slowly. This progress is about to dramatically change with the deployment of electron microscopes having both probe and imaging aberration correction systems [3][4]. The correctors in these new instruments significantly increase the useable range of convergence (pre-specimen) and collection (post-specimen) angles and thus are poised to substantially improve the depth of field performance of SCEM. SCEM differs from a related method termed, 3D STEM, which employs no post specimen lenses, and has also demonstrated depth resolution in aberration corrected STEM instruments [5][6]. 3D STEM achieves its results by controlling only the prespecimen beam convergence and focus and requires a detailed knowledge of the probe-specimen interaction. In contrast, the exciting prospects for SCEM are derived from its potential to improve depth resolution, and/or in its ability to image albeit at lower resolution depth information in extremely thick specimens [1].In this study, we have successfully implemented the SCEM mode on a FEI double corrected Titan 3 FEG-TEM/STEM at the Monash Centre for Electron Microscopy. This was accomplished by configuring the instrument as described elsewhere [2], however, unlike that previous work, this instrument is equipped with pre and post specimen aberration correctors. Here, in SCEM mode, a ~ 0.2 nm, 300 kV, 30 mr half angle incident probe was scanned across the specimen, while simultaneously the post specimen lenses were used to image the descanned probe on to a conjugate detector plane. The size and extent of the virtual SCEM aperture in this plane was controlled by the post specimen detector size and the effective magnification of the post specimen imaging system. Images were recorded simultaneously as BF/ADF pairs at the same defocus, with STEM and SCEM images recorded sequentially, owing to the need to reconfigure post specimen optics between modes.In Figure 1 we present 2 pairs of SCEM and STEM images of a large cluster of ~ 6 nm diameter core/shell Au/Pt nanoparticles recorded at 2 different defocus values (Δf = 70 & 140 nm), the data being part of a complete through focal series (0-170 nm in 10 nm steps). In order to compare these two data sets with the same image contrast range all images were processed in the identical manner to normalize their intensity distribution. First a 15 pixel Gaussian blurred self-image was subtracted from each data set. The contrast levels were next normalized to achieve the same dynamic range and finally the background level shifted to achieve the same grey level of the average background intensity of the support film. This yielded a comparable intensity ranges in the image intensity distributions and facilitated direct comparisons, without loss of clarity or resolution.In the STEM BF image of figure 1 (lower pair), we see the paucity of depth of field information expected from classi...

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Confocal operation of a transmission electron microscope with two aberration correctors

Cited by 104 publications

References 16 publications

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

Applications of the Oxford-JEOL aberration-corrected electron microscope

Scanning Confocal Electron Microscopy in a FEI Double Corrected Titan3 TEM/STEM

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