2017
DOI: 10.1364/ome.7.002477
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Conformal spray-deposited fluorine-doped tin oxide for mid- and long-wave infrared plasmonics

Abstract: Nanocrystalline spray-deposited fluorine-doped tin oxide (FTO) was investigated for mid-and long-wave infrared plasmonics. Silicon lamellar gratings were conformally coated with FTO, and the excitation of surface plasmon polaritons (SPP) was investigated via their angle and wavelength-dependent reflectivity. Photon-to-SPP coupling efficiency as a function of grating parameters, and in comparsion to gallium-doped zinc oxide (GZO) gratings, was quantitatively analyzed based on a figure of merit related to the sh… Show more

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Cited by 7 publications
(1 citation statement)
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“…Firstly, the radii of O 2− and F − are similar, which could prevent lattice mismatch in doping; next, the introduction of fluorine would inhabit formation of oxygen vacancies; then, it's easy to prepare F doped TCOs by CVD, spray‐pyrolysis, and other low‐cost technology. Due to the fact that electrons are readily trapped in fluorine sites, fluorine doped TCOs show limitations in electron mobility (15.3 cm 2 V −1 s −1 comparing to 36.4 cm 2 V −1 s −1 for ITO) . Surface plasmon properties of fluorine doped tin oxides and their applications in mid‐infrared are reported recently, With the aids of grating coupling, SPP modes are successfully excited by a 7.5 µm and a 10 µm periodic grating, respectively, showing two absorption bands located at 8 and 10.3 µm in FTIR spectrum, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…Firstly, the radii of O 2− and F − are similar, which could prevent lattice mismatch in doping; next, the introduction of fluorine would inhabit formation of oxygen vacancies; then, it's easy to prepare F doped TCOs by CVD, spray‐pyrolysis, and other low‐cost technology. Due to the fact that electrons are readily trapped in fluorine sites, fluorine doped TCOs show limitations in electron mobility (15.3 cm 2 V −1 s −1 comparing to 36.4 cm 2 V −1 s −1 for ITO) . Surface plasmon properties of fluorine doped tin oxides and their applications in mid‐infrared are reported recently, With the aids of grating coupling, SPP modes are successfully excited by a 7.5 µm and a 10 µm periodic grating, respectively, showing two absorption bands located at 8 and 10.3 µm in FTIR spectrum, respectively.…”
Section: Methodsmentioning
confidence: 99%