MHS'96 Proceedings of the Seventh International Symposium on Micro Machine and Human Science
DOI: 10.1109/mhs.1996.563401
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Consideration on the producing of high aspect ratio micro parts using UV sensitive photopolymer

Abstract: This research work deals with the methods for manufacturing high aspect ratio micro mechanical parts by using UV photopolymer. In the first method, polymer structures are produced using a mask-based method. And the second i s a direct focused UV laser beam writing method. The irradiated portion of the liquid photopolymer i s solidified and i t becomes a polymer structure. At first, the solidified shape of the polymer i s examined in each method and the optimum conditions to produce high aspect ratio structures… Show more

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Cited by 21 publications
(20 citation statements)
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“…A number of SL researchers continue using laser-based scanning systems today, although much focus of current efforts is in mask-based SL systems, where entire layers are projected at a single time using a physical mask instead of scanning the surface with a laser beam. The mask-based SL method was suggested by Nakamoto and Yamaguchi (1996). Further developments led to a dynamic mask projection SL system in 1997 by Bertsch et al where a Liquid Crystal Display (LCD) was used as a dynamic mask instead of the physical mask as used by Nakamotoa and Yamaguchi.…”
Section: Introductionmentioning
confidence: 99%
“…A number of SL researchers continue using laser-based scanning systems today, although much focus of current efforts is in mask-based SL systems, where entire layers are projected at a single time using a physical mask instead of scanning the surface with a laser beam. The mask-based SL method was suggested by Nakamoto and Yamaguchi (1996). Further developments led to a dynamic mask projection SL system in 1997 by Bertsch et al where a Liquid Crystal Display (LCD) was used as a dynamic mask instead of the physical mask as used by Nakamotoa and Yamaguchi.…”
Section: Introductionmentioning
confidence: 99%
“…In this process, a white light source is used to project the cross-sections of the 3D part, one projection at a time, with the help of a digital mask [ 65 ]. The idea of this process was invented by Nakamoto and Yamaguchi in 1996 when they used a physical mask instead of a digital projector [ 66 ]. This process, as well as the SLA, also belongs to the category “vat photopolymerization”.…”
Section: Additive Manufacturing Processes For Ceramic and Their Prmentioning
confidence: 99%
“…In this process, a white light source is used to project the crosssections of the 3D part, one projection at a time, with the help of a digital mask [74]. The idea of this process was invented by Nakamoto and Yamaguchi in 1996 [83] when they used a physical mask instead of a digital projector. This process, as well as the SLA, also belongs to the category "Vat photopolymerization".…”
Section: Digital Light Processing (Dlp)mentioning
confidence: 99%