Constitutive Equations of Piezoelectric Layered Beams With Interdigitated Electrodes

Nguyen, Cong Tien; Hanke, Ulrik; Halvorsen, Einar

doi:10.1109/tuffc.2018.2844183

Cited by 8 publications

(7 citation statements)

References 37 publications

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“…In a more general case, C st has a different contribution due to electrodes (which typically are placed horizontally on top) and also due to busbars and contact pads. The best option to estimate C st is to use FEM, even though there are some elaborated formulas that could be also used [14,15]. Indeed, in the actual case since the electrodes are placed on top of the layers, both C piezo and C st are affected.…”

Section: Fig 1 (A) Transversely and (B) Laterally Excited Membrane Resonators (C) Studied Geometry Of Main Piezoelectric Layer With Two Dmentioning

confidence: 99%

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Plessky

Kucuk

Yandrapalli

et al. 2021

Electronics Letters

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The recently invented laterally excited bulk wave resonators (XBARs) demonstrate outstanding parameters suitable for the design of low loss filters for the fifth generation of mobile phones. The operation of XBARs can be interpreted as an excitation of anti‐symmetric Lamb mode A1 by the interdigital transducer. However, it can also be seen as the generation of fundamental plate resonances in a set of parallelly connected quasi‐independent resonators, excited by a lateral electric field created by narrow electrodes with alternating polarity. By exploiting this latter interpretation, we propose a formula for the admittance of multi‐layered membranes, including the main piezoelectric layer of suitable orientation and different additional dielectric layers on both sides of the membranes. The structure can be asymmetric and the excitation of all shear wave thickness resonances, not only with odd numbers, is described. The formula can be used for the one‐dimensional modelling and optimisation of XBARs and the estimation of the resonance frequency dependence on the deposited trimming thin layers.

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Section: Fig 1 (A) Transversely and (B) Laterally Excited Membrane Resonators (C) Studied Geometry Of Main Piezoelectric Layer With Two Dmentioning

confidence: 99%

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Plessky

Kucuk

Yandrapalli

et al. 2021

Electronics Letters

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“…By varying the shapes and dimensions of the membrane, such as the thickness and size, different performance outputs can be obtained. Additionally, the choice of material selected as the membrane also affects the performance of a PMUT due to the acoustic strain relationship, which is determined by the piezoelectric constant [ 13 , 14 ]. Common piezoelectric materials such as zinc oxide (ZnO), lead zirconate titanate (PZT), and aluminum nitrate (AlN) are among the prevalent membrane materials, having different coupling coefficients and dielectric constants, which can be manipulated to produce different performance results [ 4 , 8 , 13 , 14 ].…”

Section: Introductionmentioning

confidence: 99%

“…Additionally, the choice of material selected as the membrane also affects the performance of a PMUT due to the acoustic strain relationship, which is determined by the piezoelectric constant [ 13 , 14 ]. Common piezoelectric materials such as zinc oxide (ZnO), lead zirconate titanate (PZT), and aluminum nitrate (AlN) are among the prevalent membrane materials, having different coupling coefficients and dielectric constants, which can be manipulated to produce different performance results [ 4 , 8 , 13 , 14 ]. The selection of different membrane shapes, dimension sizes, and suitable materials depends on the complexity of the process and the fabrication technique, as well as the available facilities.…”

Section: Introductionmentioning

confidence: 99%

“…Cavity-based devices are preferred, as they provide space for membrane deflection, increasing the sensitivity [ 3 ]. The use of additional layers such as matching and backing layers has also been proposed in several studies for specific applications [ 6 , 14 ]. Matching layers are crucial in reducing the acoustic impedance between different transmission mediums, while the backing layers inside cavities have been proposed by some researchers to withstand excessive deflection and avoid membrane rupture.…”

Section: Introductionmentioning

confidence: 99%

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A Fluidics-Based Double Flexural Membrane Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for Wide-Bandwidth Underwater Acoustic Applications

Ahmad

Rahman

Zain

et al. 2021

Sensors

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In acoustic receiver design, the receiving sensitivity and bandwidth are two primary parameters that determine the performance of a device. The trade-off between sensitivity and bandwidth makes the design very challenging, meaning it needs to be fine-tuned to suit specific applications. The ability to design a PMUT with high receiving sensitivity and a wide bandwidth is crucial to allow a wide spectrum of transmitted frequencies to be efficiently received. This paper presents a novel structure involving a double flexural membrane with a fluidic backing layer based on an in-plane polarization mode to optimize both the receiving sensitivity and frequency bandwidth for medium-range underwater acoustic applications. In this structure, the membrane material and electrode configuration are optimized to produce good receiving sensitivity. Simultaneously, a fluidic backing layer is introduced into the double flexural membrane to increase the bandwidth. Several piezoelectric membrane materials and various electrode dimensions were simulated using finite element analysis (FEA) techniques to study the receiving performance of the proposed structure. The final structure was then fabricated based on the findings from the simulation work. The pulse–echo experimental method was used to characterize and verify the performance of the proposed device. The proposed structure was found to have an improved bandwidth of 56.6% with a receiving sensitivity of −1.8864 dB rel 1 V µPa. For the proposed device, the resonance frequency and center frequency were 600 and 662.5 kHz, respectively, indicating its suitability for the targeted frequency range.

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“…Nguyen et al [75] have developed the constitutive equations for two types of piezoelectric harvesters, 31-mode by the top and bottom electrodes (TBE) and 33mode by interdigitated electrodes (IDE).…”

Section: Constitutive Equations For Piezoelectric Materialsmentioning

confidence: 99%

Design, modeling, and analysis of piezoelectric energy harvesters

Khazaee

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Constitutive Equations of Piezoelectric Layered Beams With Interdigitated Electrodes

Cited by 8 publications

References 37 publications

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

A formula for the admittance of laterally excited bulk wave resonators (XBARs)

A Fluidics-Based Double Flexural Membrane Piezoelectric Micromachined Ultrasonic Transducer (PMUT) for Wide-Bandwidth Underwater Acoustic Applications

Design, modeling, and analysis of piezoelectric energy harvesters

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