Construction of a standard force machine for the range of 100μN–200mN

Schlegel, Christian; Slanina, Oliver; Haucke, Günther; Kumme, Rolf

doi:10.1016/j.measurement.2011.11.022

Cited by 14 publications

(8 citation statements)

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“…In addition to the tests presented here, a comparison of the measured values with a deadweight force standard machine is planned, as well as long-term testing of the creep behavior. Likewise, the force transducer is to be tested for its adequacy for precision measurements in a special force standard machine for small forces (Schlegel et al, 2010). Because of the observed short response times and good damping behavior, dynamic testing of the sensor is needed.…”

Section: Discussionmentioning

confidence: 99%

Thin film sensors for measuring small forces

Schmaljohann

Hagedorn

Löffler

2015

J. Sens. Sens. Syst.

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Abstract. Especially in the case of measuring small forces, the use of conventional foil strain gauges is limited. The measurement uncertainty rises by force shunts and is due to the polymer foils used, as they are susceptible to moisture. Strain gauges in thin film technology present a potential solution to overcome these effects because of their direct and atomic contact with the measuring body, omitting an adhesive layer and the polymer foil.For force measurements up to 1 N, a suitable deformation element was developed by finite element (FE) analysis. This element is designed for an approximate strain of 1000 µm m −1 at the designated nominal load. The thin film system was applied by magnetron sputtering. The strain gauge structure is fabricated by distinct photolithographic steps.The developed sensors were tested with different load increments. The functional capability of the single resistance strain gauges could be proven. Moreover, a developed sensor in a full bridge circuit showed a linear characteristic with low deviation and good stability.

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Section: Discussionmentioning

confidence: 99%

Thin film sensors for measuring small forces

Schmaljohann

Hagedorn

Löffler

2015

J. Sens. Sens. Syst.

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“…The prototype device has a magnet-coil set, designed to cover the field of the forces ranging between 100 mN and 0.1 N [21]. Its use remains conditioned by its connection to the SI units via mass standards.…”

Section: Transfer Devicesmentioning

confidence: 99%

Traceability of small force measurements and the future international system of units (SI)

Khélifa

Averlant

Himbert

2016

Int. J. Metrol. Qual. Eng.

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Abstract. The unit of force is connected to the international prototype of the kilogramme, unit of mass in the international system of units (SI), via dead weight machines using calibrated masses. However, forces below 10 mN, ubiquitous in nature and in some devices cannot be measured with a traceability to the SI. The measurement, with the uncertainty of these forces has implications for both basic and applied science. Today, many emerging sectors in micro/nanotechnology and biotechnology have started producing and using systems to implement low forces that, for various reasons, require them to be traceable. Also, the revision of the SI, scheduled for 2018 year, of linking the definitions of the kilogramme, the ampere, the kelvin and the mole to fixed numerical values of fundamental constants, has aroused particular interest in the measurement and calibration of small forces. In this paper, we will give some indications of the state of the art on the small force with a focus on the development of a force sensor using a photoelastic crystal as a monolithic solid-state laser. Basically, the force to be measured is applied to the crystal induces a birefringence in the laser medium which in turn manifests itself by the appearance of a splitting between the frequencies associated with the two polarization components of the oscillating laser mode. This difference is then exploited because, within the elastic limit of the crystal, it is proportional to the force acting on the laser.

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“…A horizontal swing electrostatic force device designed by Physikalisch–Technische Bundesanstalt uses nine parallel plates as electrodes and eight electrodes corresponding to two external conductive disks. The device can measure static forces below 10 −5 N and has a resolution of 10 −12 N [ 12 , 13 , 14 ]. On the basis of the measurement principle of atomic force microscopy [ 15 , 16 ], Korea Research Institute of Standards and Science produces a nanometer force standard instrument, which combines precision balance with an atomic force microcantilever and has a resolution of 1 nN precision balance and a resolution of 1 nm precision translation table, for microforce measurement [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

Simplified Method of Microcontact Force Measurement by Using Micropressure Sensor

et al. 2021

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Microcontact force measurement is widely applied in micro/nano manufacturing, medicine and microelectromechanical systems. Most microcontact force measurements are performed by using mass comparators, nano-indenter and precision electronic balance, and weighing sensors. However, these instruments have a complex structure and high cost. Nevertheless, the rapid development of microsensor technology provides a new, simple and low-cost approach for microcontact force measurement. In this study, we present a method of microcontact force measurement by using micropressure sensors and study the relationship amongst the microcontact force, output voltage and contact position of the sensor. We use a microcapacitance pressure sensor as an example, then we perform a simulation calculation and construct a microcontact force experiment system to verify the simulation results. The experimental and simulation results are consistent. In addition, an equation that describes the relationship amongst the microcontact force, output voltage and contact position of the sensor is obtained. Based on this simple and low-cost method, we build a micro-manipulation system, which indicates that the micropressure sensors can be used to measure microcontact force in various applications easily and cost-effectively. Furthermore, it is considerably relevant to research and application in this field.

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Construction of a standard force machine for the range of 100μN–200mN

Cited by 14 publications

References 0 publications

Thin film sensors for measuring small forces

Thin film sensors for measuring small forces

Traceability of small force measurements and the future international system of units (SI)

Simplified Method of Microcontact Force Measurement by Using Micropressure Sensor

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