Contamination control of a corona discharge air ionizer

Takeuchi, Manabu; Imazono, H.; Terashige, Takashi; Kusakari, Satoshi; Tsuruta, N.; Okano, Keiichi

doi:10.1109/issm.2003.1243332

Cited by 7 publications

(3 citation statements)

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“…Particle generation might be reduced by decreasing applied voltage (Romay et al, 1994). A dual jet design also reduced the particle generation from an air ionizer (Takeuchi et al, 2003). In this work, it has been confirmed that the particle generation by ESP could be affected by air velocity, temperature and electric field strength.…”

Section: Resultssupporting

confidence: 56%

From electrostatic precipitation to nanoparticle generation

Lin¹,

Huang²,

Kuo³

et al. 2012

Journal of Aerosol Science

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Section: Resultssupporting

confidence: 56%

From electrostatic precipitation to nanoparticle generation

Lin¹,

Huang²,

Kuo³

et al. 2012

Journal of Aerosol Science

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“…Electrode pitting can lead to some electrode particles being ejected from the electrode surface, causing a gradual loss of mass [191]. In addition, the emitter electrode can collect contaminates along its surface during a discharge [192,193]. These corrosive effects act to modify the surface of the electrodes and alter the surrounding electric field lines.…”

Section: Ongoing Challenges With the Development Of Ehd Devicesmentioning

confidence: 99%

Recent advances in electrohydrodynamic pumps operated by ionic winds: a review

Johnson

2017

Plasma Sources Sci. Technol.

117

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An ionic or electric wind is a bulk air movement induced by electrohydrodynamic (EHD) phenomena in a gas discharge. Because they are silent, low power, respond rapidly, and require no moving parts, ionic wind devices have been proposed for a wide range of applications, ranging from convection cooling and food drying to combustion management. The past several decades have seen the area grow tremendously leading to a number of new actuation strategies and devices that can be incorporated into various applications. In this review, we discuss the physics of ionic winds and recent developments of the past five years that have pushed the field forward, focusing on the development on bulk air-moving devices we term EHD pumps. We then highlight the ongoing challenges with transitioning ionic wind technologies to the market place, from issues that affect robustness to practical implementation, and point to areas where future research could have an impact on the field.

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“…In the manufacturing processes of these electronic devices, particularly the semiconductor and magnetic recording devices, electrostatic charges could lead to the destruction of these devices because of electrostatic discharge (ESD) damage (1) . Electrostatic charges also increase the attraction of unwanted particulate contaminants onto the surface of the devices; this phenomenon is commonly referred to as electrostatic attraction (ESA) (2) (3) . In the manufacturing process, electrostatic charges and ESD/ESA events may also cause machine interruptions and operational errors (3)- (5) .…”

Section: Introductionmentioning

confidence: 99%