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A corona discharge air ionizer is one of the most usefill equipment to control electrostatic charges on ULSI in the manufacturing processes. However, a conventional air ionizer generates various kinds of contamination. The dual jet air ionizer that has a jet emitter in a nozzle was proposed to reduce the contamination from an air ionizer. The ozone generation, the particle generation, and the cluster-7ike material growth to the emitter tip were investigated for the dual jet air ionizer as a function of the jet flow rates out of the emitter and the noale. These contamination generated from the dual jet air ionizer depended strongly on the flow rates and were lower than that from a conventional air ionizer. These contamination characteristics of the dual jet air ionizer were compared with adconventional air ionizer.

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