A novel flow sensor is presented to measure the flow rate within microchannels in a real-time, noncontact and nonintrusive manner. The microfluidic device is made of a fluidic microchannel sealed with a thin polymer layer interfacing the fluidics and microwave electronics. Deformation of the thin circular membrane alters the permittivity and conductivity over the sensitive zone of the microwave resonator device and enables high-resolution detection of flow rate in microfluidic channels using noncontact microwave as a standalone system. The flow sensor has the linear response in the range of 0-150 µl/min for the optimal sensor performance. The highest sensitivity is detected to be 0.5 µl/min for the membrane with the diameter of 3 mm and the thickness of 100 µm. The sensor is reproducible with the error of 0.1% for the flow rate of 10 µl/min. Furthermore, the sensor functioned very stable for 20 hrs performance within the cell culture incubator in 37 °C and 5% CO 2 environment for detecting the flow rate of the culture medium. This sensor does not need any contact with the liquid and is highly compatible with several applications in energy and biomedical engineering, and particularly for microfluidic-based lab-on-chips, micro-bioreactors and organ-on-chips platforms.Microfluidic techniques have been extensively used for efficient manipulation of fluid flow in microscale for biomedical research and analytical chemistry. The control of flow in microfluidic networks is crucial for cell sorting, cell collection, flow mixing, cell adhesion and culture, droplet manipulation and flow driving 1 . Moreover, the flow rate needs to be accurately quantified to determine the concentration of cells 2 , and production of hollow microspheres . A slight change in flow rate may lead to a size variation in the products. To precisely handle fluids at the microscale, the real-time detection of flow rate in microfluidic environment is essential and urgently needed though challenging.Organ-on-a-chip (OOC) technology, in particular, aims to build biomimetic in vitro physiological micro-organs to compliment animal models in biological systems and benefit the pharmaceutical industry for drug discovery 7,8 . Many groups including ours have developed OOC platforms made of microbioreactors and integrated sensors for long-term and real-time monitoring the microenvironment, screening the status of miniaturized organs, and characterizing the response of micro-tissues to drugs [9][10][11][12][13] . The real-time measurement of heat transfer 14 , differential pressure 15 , pH and oxygen 11 and biomarkers 10 are central to biomimetic performance of OOC systems. Miniaturized biosensors provide favorable features like low-cost reagents consumption, decreased processing time, reduced sample volume, laminar flow to cells, parallel detection for multiple samples as well as portability 12,13,16 . However, the OOC systems still need on-chip integrated flow sensors compatible with their fabrication processes and functions
17. The OOC platforms require the...