Continuous-time lowpass and bandpass &amp;#x0394;&amp;#x03A3;-modulators for closed-loop readout circuits of capacitive MEMS gyroscopes

Rombach, S.; Maurer, Michael; Manoli, Yiannos

doi:10.1109/inertialsensors.2015.7314262

Cited by 3 publications

(3 citation statements)

References 22 publications

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“…In this circuit design, all of the electronic filters adopt the same parameters; thus, c 1 = c 2 = c. When the frequency of the input signal changes, the frequency response of NTF in (2) and TF in (3) will change correspondingly, as shown in expressions (4) and (5). Figure 5 depicts the frequency response of the transfer functions (4) and (5). Obviously, the corresponding frequency of the peak response in the signal observation is consistent with the notch frequency in the Σ∆ modulator, which is the main principle of the signal observation design.…”

Section: Loop Filter Architecture In Signal Obsesrvationmentioning

confidence: 99%

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An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

Zou

et al. 2020

Sensors

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This paper presents the design and implementation of an auto-tuning continuous-time bandpass sigma-delta (ΣΔ) modulator for micro-electromechchanical systems (MEMS) gyroscope readout systems. Its notch frequency can well match the input signal frequency by adding a signal observation to the traditional ΣΔ modulator. The filter of the observation adopts the same architecture as that of the traditional ΣΔ modulator, allowing the two filters to have the same response to input signal change, which is converted into a control voltage on metal-oxide semiconductor (MOS) resistance in the filters. The automatic tuning not only works to solve the mismatch problem caused by process error and temperature variation, but can also be applied to the interface circuit of gyroscopes with different resonant frequencies. The circuit is implemented in a 0.18-μm complementary metal-oxide semiconductor (CMOS) process with a core area of 2.4 mm2. The improved modulator achieves a dynamic range of 106 dB, a noise floor below 120 dB and a maximum signal-to-noise and distortion ratio (SNDR) of 86.4 dB. The tuning capability of the chip is relatively stable under input signals from 6 to 15 kHz at temperatures ranging from −45 to 60 °C.

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Section: Loop Filter Architecture In Signal Obsesrvationmentioning

confidence: 99%

“…Additionally, Σ∆ modulators are normally used as high-resolution ADCs with low power. The sampling rate is well above the Nyquist rate to spread the quantization noise over a larger frequency band, and a high amplification in the loop filter causes a suppression of the quantization noise [5].…”

Section: Introductionmentioning

confidence: 99%

An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

Zou

et al. 2020

Sensors

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“…Various MEMS manufacturers employ Delta-Sigma-modulation schemes to operate MEMS gyroscopes (see e.g., [27,28,29]). Major benefits are low size and low power consumption.…”

Section: Mems Gyroscopesmentioning

confidence: 99%

MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison

Deppe

Dorner

König

et al. 2017

Sensors

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In the following paper, we present an industry perspective of inertial sensors for navigation purposes driven by applications and customer needs. Microelectromechanical system (MEMS) inertial sensors have revolutionized consumer, automotive, and industrial applications and they have started to fulfill the high end tactical grade performance requirements of hybrid navigation systems on a series production scale. The Fiber Optic Gyroscope (FOG) technology, on the other hand, is further pushed into the near navigation grade performance region and beyond. Each technology has its special pros and cons making it more or less suitable for specific applications. In our overview paper, we present latest improvements at NG LITEF in tactical and navigation grade MEMS accelerometers, MEMS gyroscopes, and Fiber Optic Gyroscopes, based on our long-term experience in the field. We demonstrate how accelerometer performance has improved by switching from wet etching to deep reactive ion etching (DRIE) technology. For MEMS gyroscopes, we show that better than 1°/h series production devices are within reach, and for FOGs we present how limitations in noise performance were overcome by signal processing. The paper also intends a comparison of the different technologies, emphasizing suitability for different navigation applications, thus providing guidance to system engineers.

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Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators

Maurer

Rombach

Manoli

2018

2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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Continuous-time lowpass and bandpass ΔΣ-modulators for closed-loop readout circuits of capacitive MEMS gyroscopes

Cited by 3 publications

References 22 publications

An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

MEMS and FOG Technologies for Tactical and Navigation Grade Inertial Sensors—Recent Improvements and Comparison

Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators

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