2015
DOI: 10.1109/tpel.2014.2354397
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Contour-Mode Ring-Shaped AlN Microresonator on Si and Feasibility of Its Application in Series-Resonant Converter

Abstract: Microelectromechanicalsystems (MEMS) resonators on Si have the potential to replace the discrete passive components in a power converter. The main intention of this paper is to present a ring-shaped aluminum nitride (AlN) piezoelectric micro-resonator that can be used as an energytransferring device to replace inductors/capacitors in low power resonant converters for biomedical applications. Finite element simulation results have been provided, showing the mode of vibration at resonant frequency. The zero volt… Show more

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Cited by 9 publications
(3 citation statements)
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“…In this way, the VCR of the converters can be controlled very precisely as opposed to switched capacitor-based converters. During the last 10 years, the co-authors of this manuscript have proposed a resonator-based power conversion architecture that can achieve high VCR without using inductors [194]- [196]. This type of "system-on-chip" solutions are still in their infancy, and extensive research is needed to come up with a universal solution that could be implanted without any EMI or MRI issues.…”
Section: Existing Reseach Gapmentioning
confidence: 99%
“…In this way, the VCR of the converters can be controlled very precisely as opposed to switched capacitor-based converters. During the last 10 years, the co-authors of this manuscript have proposed a resonator-based power conversion architecture that can achieve high VCR without using inductors [194]- [196]. This type of "system-on-chip" solutions are still in their infancy, and extensive research is needed to come up with a universal solution that could be implanted without any EMI or MRI issues.…”
Section: Existing Reseach Gapmentioning
confidence: 99%
“…2. It is also worth mentioning, that TiN may also be formed by the direct reaction between the precursors: AlN + TiB 2 → AlB 2 + TiN (3) in which the AlB 2 compound would also be formed and incorpored into the composite structure, Fig. 2, at all sintering temperatures.…”
Section: Diffraction Angle (2θ) Xrd Relative Intensitymentioning
confidence: 99%
“…This unique thermal and mechanical properties exhibited by AlN earned its numerous applications in electronics, automotive, defense and aerospace industries [2]. In particular, AlN films have been extensively applied as microelectronics materials in micro-electrical-mechanical systems (MEMS) [3,4], high temperature exhausting sensor [5], solar collector [6], light emitting diode (LED) [7], just to mention few examples. As bulk composites, AlN is being combined with copper [8], aluminum alloy [9], borosilicate [10] and steel [11].…”
Section: Introductionmentioning
confidence: 99%