Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing

Rakotondrabe, Micky; Fowler, Anthony G.; Moheimani, S. O. Reza

doi:10.1109/tcst.2013.2284923

Cited by 29 publications

(3 citation statements)

References 32 publications

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“…The tracking path of the XY-stage shows small deviations at the zero points of X-and Y-axes, which arose from the structural buckling instability of the Z-shaped beams (that is, the two long sub-beams of the Z-beam need to be first buckled, at zero displacement output, to bend the Z-beam). Implementing a model-based controller [25] and introducing control strategies for vibration suppression [42] could effectively reduce these beam-buckling-induced tracking errors. Choosing a capacitance readout chip with a higher sampling frequency (e.g.…”

Section: Calibration Results and Discussionmentioning

confidence: 99%

“…>1 mN), electrothermal actuators are more appropriate for actuation of MEMS XY-stages. The classical V-beam electrothermal actuators have been employed in some MEMS XY-stages [21][22][23], which produce millinewton-level output forces at an actuation voltage of <10 V. Recently, electrothermal actuators with Z-shaped thermal expansion beams (which are called Z-beam actuators) were also developed and used in MEMS XY-stages [25][26][27][28]. The Z-beam actuator has lower axial stiffness than the V-beam actuator, and thus allows for bidirectional actuation.…”

Section: Introductionmentioning

confidence: 99%

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A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Clancy

et al. 2016

J. Micromech. Microeng.

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With the advancement of microelectromechanical systems (MEMS), MEMS nanopositioning stages have also been developed with appealing advantages such as small footprint, low power consumption, fast dynamics, and low unit cost [3-5]. These MEMS devices are mainly applied to optical scanning [6, 7], SPM sample scanning [8-10], micro-and nanomanipulation [11-14], and probe-based high-density data storage [15-17]. According to their output motions, MEMS nanopositioning stages fall into three categories: translational (XY and XYZ)

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Section: Calibration Results and Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Clancy

et al. 2016

J. Micromech. Microeng.

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“…Double-stepped beam electrothermal microactuators, with two steps positioned symmetrically at both sides of the beam, have been extensively studied using analytical [9] and numerical finite element [14] methods. Such devices are used to produce pure in-plane [25] or out-of-plane [11] displacement in on-chip MEMS-based positioning devices [25][26][27][28]. In contrast, single-stepped beam electrothermal microactuators have not been studied extensively and their potential applications have not been investigated as widely as their double-stepped counterparts.…”

Section: Introductionmentioning

confidence: 99%

Electrothermomechanical modeling of out-of-plane deformation in single-stepped beams actuated by resistive heating

Sohi¹,

Nieva²,

Khajepour³

2015

J. Micromech. Microeng.

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An analytical model for the electrothermomechanical analysis of out-of-plane deformation in resistively heated single-stepped beams is presented. The model takes into account the conductive heat transfer from the beam to the substrate in which it is anchored. It also considers the temperature dependence of the beam material properties and accounts for the locally enhanced resistive heating effect around the release holes in the beam to predict temperature distribution along the beam. Energy method and Euler–Bernoulli beam theory are used for the prediction of out-of-plane deformation and stress distribution of the beam, as well as the out-of-plane rotation at the middle of the beam. The model considers the nonuniformity of the air gap between the beam and the substrate and captures the resultant asymmetric temperature distribution along the beam. The out-of-plane rotations in the middle of the single-stepped beam predicted by the analytical model and measured experimentally agree within 10%. The analytical model is then used to predict the maximum actuation current, which results in high temperature plastic deformation and agrees with the experiments within 5%. The proposed analytical model provides a good approach for systematic design and analysis of out-of-plane electrothermal microactuators based on single-stepped beam design.

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A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Rana

Pota

Petersen

2018

Asian Journal of Control

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In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. For control engineers, the PTS is particularly interesting since its ability to enable the AFM to undertake 3D imaging is entirely dependent upon the use of a feedback loop. However, it suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs); and (iv) effect of thermal drift. This article presents a survey of the literature on the PTS, an overview of a few existing innovative solutions for its nanopositioning and future research directions. This article will help the reader to walk around the present development of the PTS aimed at meeting the requirements for high-speed AFM imaging.

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Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing

Cited by 29 publications

References 32 publications

A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Electrothermomechanical modeling of out-of-plane deformation in single-stepped beams actuated by resistive heating

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

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