1998
DOI: 10.1063/1.122232
|View full text |Cite
|
Sign up to set email alerts
|

Control of antenna coupling in high-density plasma production by m=0 helicon waves

Abstract: Antenna coupling has been controlled in high-density plasma production by m=0 helicon waves using multiple-loop antennas and varying the phase and the distance between antennas. When two single-loop antennas are connected in series with the phase between the two being zero, threshold power for the density jump Pth is reduced by a factor of 2–3 compared with that of the one-turn loop antenna. This reduction in Pth is caused by the increase in antenna coupling at the lower plasma density. The observed difference… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
11
0

Year Published

1999
1999
2019
2019

Publication Types

Select...
8

Relationship

1
7

Authors

Journals

citations
Cited by 16 publications
(11 citation statements)
references
References 15 publications
0
11
0
Order By: Relevance
“…We see two discharge modes in Ar; one is the LD mode, in which the discharge is sustained by an antenna induction field at low P rf (р0.4 kW); the other is the HD mode, in which plasmas are produced by helicon waves at high P rf (у0.5 kW͒; in between the two modes, n p jumps by more than an order-of-magnitude. 17,20 The density-jump is also observed in Xe and He. In Xe, n p is unstable and shows two levels within 5 ms of the pulse length at the vicinity of the densityjump, which is shown in Fig.…”
Section: ͑8͒mentioning
confidence: 70%
See 2 more Smart Citations
“…We see two discharge modes in Ar; one is the LD mode, in which the discharge is sustained by an antenna induction field at low P rf (р0.4 kW); the other is the HD mode, in which plasmas are produced by helicon waves at high P rf (у0.5 kW͒; in between the two modes, n p jumps by more than an order-of-magnitude. 17,20 The density-jump is also observed in Xe and He. In Xe, n p is unstable and shows two levels within 5 ms of the pulse length at the vicinity of the densityjump, which is shown in Fig.…”
Section: ͑8͒mentioning
confidence: 70%
“…Two single-loop antennas ͑width of each antennaϭ1.5 cm, separationϭ10 cm͒, which are connected in series with the phase between the two being zero ͑0°antenna͒, are used to excite the mϭ0 azimuthal helicon mode. 20 Measurements are conducted at tϭ4.5 ms, where t ϭ0 corresponds to the time when the rf current is applied. A static magnetic field of B 0 р1.4 kG at the plasma center is generated in the axial direction via five magnetic coils and three power supplies.…”
Section: ͑8͒mentioning
confidence: 99%
See 1 more Smart Citation
“…For reasons which will become clear, our design uses m = 0 antennas. The behavior of such antennas has also been studied by numerous authors [35][36][37] .…”
Section: Methodsmentioning
confidence: 99%
“…In order to develop a compact, high-density plasma source of L λ z , where L is the plasma length and λ z is the axial wavelength of the helicon wave, we have been studying plasma production using an m = 0 azimuthal mode [3][4][5][6][7] of standing helicon waves (SHWs). Excitation of SHWs has been reported by several reseachers.…”
Section: Introductionmentioning
confidence: 99%