Control of buckling in large micromembranes using engineered support structures

Iwase, Eiji; Hui, Pui-Chuen; Woolf, David; Rodríguez, Alejandro W.; Johnson, Steven G.; Capasso, Federico; Lončar, Marko

doi:10.1088/0960-1317/22/6/065028

Cited by 44 publications

(48 citation statements)

References 23 publications

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“…This is an issue which has been observed in most double-membrane MOEMS and which does not allow to predict the initial coupling strength and the wavelength of the modes. Techniques to control the buckling should therefore be investigated to improve the repeatibility of devices [43]. The Q factor is of both modes is not as high as expected from simulations.…”

Section: A Ingaasp/inp Devicesmentioning

confidence: 99%

“…Critical point drying would be advantageous to completely eliminate the capillary forces and to reach an optimum design. In this case, however, a more accurate model is needed to keep into account the effects of strain and techniques to control buckling should be implemented [43]. To be on the safe side, conservative values of t = 180 nm and z 0 = 240 nm have been chosen for InP devices and t = 160 nm and z 0 = 200 nm for GaAs (red boxes in Fig.…”

Section: B Device Geometry Designmentioning

confidence: 99%

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Design and Optical Properties of Electromechanical Double-Membrane Photonic Crystal Cavities

Midolo

Fiore

2014

IEEE J. Quantum Electron.

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Abstract-We discuss relevant design considerations for the fabrication of electromechanically tunable photonic crystal cavities based on double semiconductor slabs. A simple optical and electromechanical model of the device based on coupled-mode theory and electrostatics is discussed and used jointly with 3-D finite-element calculations of optical cavity modes to extract the tuning-range dependence on geometrical parameters. A design rule, which avoids the sticking of membranes due to capillary forces and keeps a large tunability, is defined. The details of the fabrication process and a summary of the experimental results on GaAs and InGaAsP/InP material systems are given. We also address the problem of nonsymmetric devices, where the thicknesses of the membranes are not exactly the same, resulting in an imbalanced power emission of coupled modes.

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Section: A Ingaasp/inp Devicesmentioning

confidence: 99%

Section: B Device Geometry Designmentioning

confidence: 99%

Design and Optical Properties of Electromechanical Double-Membrane Photonic Crystal Cavities

Midolo

Fiore

2014

IEEE J. Quantum Electron.

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“…The area of the bridge (14x8 µm 2 ) ensures a sufficient in-plane confinement around the cavity defect. Additional external trenches are patterned close to the supporting arms to release any internal stress accumulated during the fabrication process and to avoid buckling of the structure 22 .…”

Section: Introductionmentioning

confidence: 99%

Nanoscale mechanical actuation and near-field read-out of photonic crystal molecules

et al. 2016

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• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. We employed the contact forces induced by a near-field tip to tune and probe the optical resonances of a mechanically-compliant photonic crystal molecule. Here, the pressure induced by the near-field tip is exploited to control the spectral proprieties of the coupled cavities in an ultra-wide spectral range, demonstrating a reversible mode shift of 37.5 nm. Besides, by monitoring the coupling strength variation due to the vertical nano-deformation of the dielectric structure, distinct tip-sample interaction regimes have been unambiguously reconstructed with a nano-Newton sensitivity.These results demonstrate an optical method for mapping mechanical forces at the nanoscale with a lateral spatial resolution below 100 nm.a) Electronic mail: m.petruzzella@tue.nl

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“…Fabrication of such membranes has been successful in metallic systems, 6,7 but has proven challenging in semiconductors like silicon. Freestanding silicon membranes have applications in electronic and photonic materials, [8][9][10][11] micromechanical devices, [12][13][14][15][16] x-ray optics, [17][18][19] macromolecular filters, 20 lithographic templates, 17,19 as sensors, 21,22 and as low-absorption supports in transmission electron microscopy. All of these applications benefit from flat crystalline structures with low lateral inhomogeneity.…”

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confidence: 99%

Edge-induced flattening in the fabrication of ultrathin freestanding crystalline silicon sheets

Gopalakrishnan

Czaplewski

McElhinny

et al. 2013

Applied Physics Letters

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Silicon nanomembranes are suspended single-crystal sheets of silicon, tens of nanometers thick, with areas in the thousands of square micrometers. Challenges in fabrication arise from buckling due to strains of over 10−3 in the silicon-on-insulator starting material. In equilibrium, the distortion is distributed across the entire membrane, minimizing the elastic energy with a large radius of curvature. We show that flat nanomembranes can be created using an elastically metastable configuration driven by the silicon-water surface energy. Membranes as thin as 6 nm are fabricated with vertical deviations below 10 nm in a central 100 μm × 100 μm area.

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Control of buckling in large micromembranes using engineered support structures

Cited by 44 publications

References 23 publications

Design and Optical Properties of Electromechanical Double-Membrane Photonic Crystal Cavities

Design and Optical Properties of Electromechanical Double-Membrane Photonic Crystal Cavities

Nanoscale mechanical actuation and near-field read-out of photonic crystal molecules

Edge-induced flattening in the fabrication of ultrathin freestanding crystalline silicon sheets

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