2019
DOI: 10.3390/ma13010093
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Control of Eu Oxidation State in Y2O3−xSx:Eu Thin-Film Phosphors Prepared by Atomic Layer Deposition: A Structural and Photoluminescence Study

Abstract: Structural and photoluminescence studies were carried out on Eu-doped Y2O3−xSx thin films grown by atomic layer deposition at 300 °C. (CH3Cp)3Y, H2O, and H2S were used as yttrium, oxygen, and sulfur precursors, respectively, while Eu(thd)3 was used as the europium precursor. The Eu oxidation state was controlled during the growth process by following the Eu(thd)3 pulse with either a H2S or O3 pulse. The Eu(thd)3/O3 pulse sequence led to photoluminescence emission above 550 nm, whereas the Eu(thd)3/H2S pulse se… Show more

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Cited by 5 publications
(5 citation statements)
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“…Note that, Eu(thd) 3 is pulsed into the ALD reactor chamber after an O 3 pulse. In a previous study it was stated that Eu may be more reactive towards the H 2 S in comparison to ozone, and thus increasing the doping level [14]. However, in the present study, the surface has an oxygen monolayer instead of a sulfur monolayer, prior to the Eu(thd) 3 pulse.…”
Section: Discussionmentioning
confidence: 57%
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“…Note that, Eu(thd) 3 is pulsed into the ALD reactor chamber after an O 3 pulse. In a previous study it was stated that Eu may be more reactive towards the H 2 S in comparison to ozone, and thus increasing the doping level [14]. However, in the present study, the surface has an oxygen monolayer instead of a sulfur monolayer, prior to the Eu(thd) 3 pulse.…”
Section: Discussionmentioning
confidence: 57%
“…These data are supported by the detection of CaCO 3 component in Figure 3b and higher carbon concentration shown in Table 2. The carbon contamination in CaS:EuO could be explained by the reaction between ozone and the β-diketonate precursor (Eu(thd) 3 ), which is known to originate carbonates in the films [14]. Additionally, the ToF-ERDA analysis revealed a lower hydrogen presence in CaS:Eu, which indicates the excellent reactivity between Ca(thd) 2 and Eu(thd) 3 with H 2 S. These efficient surface reactions are responsible to effectively remove lighter species, such as H [36].…”
Section: Discussionmentioning
confidence: 99%
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“…In a previous paper, we reported the growth of blue and red Y 2 O 3-x S x :Eu phosphors by ALD [ 33 ]. In this work, we focus on the fabrication and the performance evaluation of Y 2 O 3 :Eu-based multilayer structure electroluminescent devices that can potentially be used in red transparent display applications.…”
Section: Introductionmentioning
confidence: 99%