Control relevant issues in semiconductor manufacturing: Overview with some new results

Su, An-Jhih; Jeng, Jyh‐Cheng; Huang, Hsiao‐Ping; Yu, Cheng‐Ching; Hung, Shih-Yu; Chao, Ching‐Kong

doi:10.1016/j.conengprac.2006.11.003

Cited by 52 publications

(16 citation statements)

References 31 publications

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“…The controlling algorithms, system interfaces and infrastructure have been widely developed and discussed in the literature over the last two decades. A comprehensive literature review is presented in Edgar et al [5] and Su et al [4], where the authors discuss challenges and possibilities in automatic control in semiconductor manufacturing. APC can be regarded as a general heading for all kinds of equipment and process engineering systems in semiconductor manufacturing.…”

Section: Role Of Advanced Process Control and Scheduling In Wafermentioning

confidence: 99%

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Yugma

Blue

Dauzère‐Pérès

et al. 2014

2014 IEEE International Conference on Automation Science and Engineering (CASE)

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Scheduling optimization in semiconductor manufacturing is always a crucial task in production performance indicators such as machine utilization, cycle time and delivery times. With the increasing complexity of fabrication techniques and scales, scheduling and control activities are inevitably confronted with each other and shall be integrated correspondingly. In particular scheduling and control are mutually dependent as control requires decisions from schedules, and scheduling should take control information into account. Based on a literature survey, we propose a general review and an outlook of the expected improvements related to binding scheduling decisions and information/constraints coming from Advanced Process Control systems in semiconductor manufacturing. Potential issues and tasks concerning this integration are addressed in this paper in order to stimulate more work in research and industrial practices.

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Section: Role Of Advanced Process Control and Scheduling In Wafermentioning

confidence: 99%

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Yugma

Blue

Dauzère‐Pérès

et al. 2014

2014 IEEE International Conference on Automation Science and Engineering (CASE)

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“…With the rapid development of the technology and fast changing requirements of the market, the batch processing has been a good candidate to produce high-value added products at lower cost Ahn et al (2007). Typical batch processes include robot arms in the manufacturing streamlines (Moore 1999;Gopinath and Kar 2004), batch reactions in the fine chemicals (Mezghani et al 2002;Youssef et al 2003;Xiong and Zhang 2003), biofermentation in the pharmaceutical industries (Ben and Youssef 2012), injection molding in the plastics processing (Gao et al 2001;, and the semiconductor production processes (Solomon et al 2001;Su et al 2007). …”

Section: Introductionmentioning

confidence: 98%

Two-dimensional generalized predictive control (2D-GPC) scheme for the batch processes with two-dimensional (2D) dynamics

Shi

Yang

Cao

et al. 2015

Multidim Syst Sign Process

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Iterative learning control (ILC) system is essentially a special feedback control system with two-dimensional (2D) dynamics that can be designed and optimized under the framework of 2D system theories. Motivated by this viewpoint, it is proposed in this paper to describe a batch process with 2D dynamics directly using a 2D controlled autoregressive moving average model, and then, design a 2D feedback controller, referred to as two-dimensional generalized predictive control, in the framework of model predictive control. The proposed design method naturally results in an ILC algorithm when the process is assumed as a one dimensional process performing a given task repetitively and guarantees the better control performance along cycle by utilizing the cycle-wise dynamics of the process. The proposed control scheme is the further generalization and extension of the two-dimensional generalized predictive iterative learning control scheme which has been developed in the previous works. It solves the problem in some degree that conventional ILC cannot guarantee the convergence when there are non-repeatable dynamics in the processes and/or in desired trajectories. The effectiveness and the applicability are illustrated by the comparisons of the simulation results and the experimental results on packing pressure control of the injection molding process.

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“…Run to Run (RtR) control (Su et al, 2007) is a process control technique which adjusts the recipe of current runs by using information of previous runs to maintain the process outputs on the desired target and reduce process drift, shift and variations. It can efficiently improve the product yield and reduce scrap, rework, and cycle time.…”

Section: Introductionmentioning

confidence: 99%

Consumption optimization by Run to Run control with zone control

Pan

Sheng

Wong

et al. 2010

Journal of the Taiwan Institute of Chemical Engineers

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Control relevant issues in semiconductor manufacturing: Overview with some new results

Cited by 52 publications

References 31 publications

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Two-dimensional generalized predictive control (2D-GPC) scheme for the batch processes with two-dimensional (2D) dynamics

Consumption optimization by Run to Run control with zone control

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