Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Abstract

Scheduling optimization in semiconductor manufacturing is always a crucial task in production performance indicators such as machine utilization, cycle time and delivery times. With the increasing complexity of fabrication techniques and scales, scheduling and control activities are inevitably confronted with each other and shall be integrated correspondingly. In particular scheduling and control are mutually dependent as control requires decisions from schedules, and scheduling should take control information into account. Based on a literature survey, we propose a general review and an outlook of the expected improvements related to binding scheduling decisions and information/constraints coming from Advanced Process Control systems in semiconductor manufacturing. Potential issues and tasks concerning this integration are addressed in this paper in order to stimulate more work in research and industrial practices.

A Dynamic Dispatching Method for Large-Scale Interbay Material Handling Systems of Semiconductor FAB

“…Thus, to evaluate the proposed scheduling method, a discrete event simulation model is developed by using Arena platform. The configuration of the wafer fab considered in this paper is modified from the Hewlett-Packard Technology Research Center Silicon Fab [29], which consists of 24 multi-server workstations (or also called as Bays), and each workstation consists of multiple identical equipment. Equipment of the same type are usually grouped into a workstation for reasons such as reduction of setup time and redundancy in case of breakdowns, improvement of efficient utilization, and easy to backup during maintenance [30].…”

A slack optimization unified model of regrouping and sequencing batches for β1 → β2 manufacturing system

“…Many researchers have considered the scheduling problems of BPM. For an overview, the readers are invited to refer to Potts and Kovalyov, 8 Mathirajan and Sivakumar, 9 Mo¨nch et al, 10 Yugma et al, 11 and Sharma and Jain. 12 The scheduling methodology of BPM in SWFS consists of mathematical programming method, simulation method, and heuristic method.…”

“…The constraints (1)- (9) and (11) build a new MILP model, which is called slack-based MILP unified model. It can be run by ILOG CPLEX.…”

Bridging the gap - integrating APC constraints and WIP flow optimization to enhance automated decision making in semiconductor manufacturing

“…Mathematical optimization approaches for solving APC time constraint issues and processing with equipment health factors are discussed and analyzed. Yugma et al [4] provide a review of the integration of scheduling and APC in the semiconductor industry and a literature survey and classification with respect to APC and scheduling. One of the main issues identified is the lack of APC information for scheduling decisions leading to proposals for the integration of equipment health information and qualification states based on APC data.…”