No abstract

Advanced process control (APC) is widely used in semiconductor manufacturing to adjust process parameters, ensuring a high product quality, while WIP flow optimization systems for scheduling & dispatching make decisions by assigning lots to tools for processing. APC imposes additional constraints to the operational decisions. It is critical to understand the relationship between these two aspects of the semiconductor manufacturing process in order to make better decisions for both. As this is a pressing and compelling topic for researchers and practitioners, this paper presents an integration approach that connects APC and WIP flow optimization systems, allowing APC aspects to be incorporated into scheduling & dispatching, in order to balance the conflict between product quality and operational objectives.