Control System for the Synthesis of Thin Films by Pulsed Laser Deposition

Garrido, Juan Manuel Conde; Kuo, Cristina; Silveyra, Josefina María

doi:10.1109/tla.2020.9085301

Cited by 4 publications

(2 citation statements)

References 23 publications

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“…Este mismo razonamiento se puede aplicar a los vapores generados en la cámara de proceso. La trampa fría actual se fabricó en vistas a su aplicación en sistemas de deposición de películas delgadas de vidrios calcogenuros por ablación láser pulsada [7][8][9]. El elemento de menor presión de vapor utilizado es el azufre, cuya presión de vapor a temperatura ambiente es de 10 −6 mbar y a −10 • C es menor a 10 −8 mbar [10].…”

Section: Introductionunclassified

First Prototype of a Low-Cost Vacuum Baffle With Electrical Feedthrough

Garrido¹,

Couselo²,

Silveyra³

2023

AnAFA

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n a previous work, Conde Garrido and Silveyra proposed a novel cold trap (baffle) technology capable of trapping contaminants in vacuum systems. The baffle was designed to be applied in systems to synthesize chalcogenide glass thin films by pulsed laser deposition. While traditional baffles are cooled down with compression cooling systems or cooling solutions such as liquid nitrogen, the reported baffle is cooled down by the thermoelectric effect, which allows for reducing the capital investment, operating costs, as well as start-up and maintenance times. This paper presents the construction, tuning, and characterization of the first physical prototype of the baffle. The characterization included, first, the control of the final pressure reached by the device. To characterize the thermal performance of the baffle, a temperature measurement system was designed and manufactured. Within this measurement system, we highlight a low-cost electric vacuum feedthrough. The results indicate that the constructed baffle can reach pressures lower than 2×10−5mbar, while the cold surfaces reach temperatures of approximately−12◦C. The vacuum and cold temperature levels meet the required conditions for the pulsed laser deposition of chalcogenide glass thin films. However, temperatures are not as low as those estimatedfor the virtual prototype (down to−50◦C). Thermal bridges and resistances present in the fabricated device, neglected in the model, were then identified, pointing out opportunities for improvement. Finally, revisions to the current design are proposed that simplify its manufacturing process, improve its robustness and efficiency, and facilitate its operation and maintenance.

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Section: Introductionunclassified

First Prototype of a Low-Cost Vacuum Baffle With Electrical Feedthrough

Garrido¹,

Couselo²,

Silveyra³

2023

AnAFA

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“…El Laboratorio de Ablación Láser (LAL) del Instituto de Tecnologías y Ciencias de la Ingeniería (INTECIN) posee un láser pulsado de Nd:YAG Spectra Physics LAB-170 y tres cámaras de deposición. Este equipamiento ha jugado un rol clave en la síntesis de nuevos materiales durante los últimos años [1][2][3][4][5][6][7][8] y se encuentra disponible para toda la comunidad científica de la región (desde 2016 el láser pertenece al Sistema Nacional del Láseres de la República Argentina [9]).…”

Section: Introductionunclassified

Design and fabrication of a fume extractor controller for pulsed laser deposition of thin films

Hirschmann,

Silveyra,

Conde Garrido

2023

Proceedings of the 21th LACCEI International Multi-Conference for Engineering, Education and Technology (LACCEI 2023): “Leaders

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The deposition of thin films by pulsed laser deposition (PLD) is performed inside a deposition chamber. When the chamber is opened to change substrates and/or targets, the material deposited on the inner walls of the chamber releases vapors that are toxic in high concentrations. In order to improve user safety and optimize both time and resources, we fabricated a low-cost fume extraction system based on a domestic vacuum cleaner motor. The system, which proved to achieve an efficient flow rate and to work at acceptable temperature and noise levels, has been operational at the INTECIN Laser Ablation Laboratory since 2021. In this work, we present a controller of the vapor extraction system. Using an Arduino Nano development board, the controller provides assistance to the user through an interactive menu on an LCD display and a push button. Also, it electronically controls the switching on and off of the extractor motor and two acoustic box coolers.We have implemented protection sensors to make the system more robust: a liquid sensor to detect possible water leaks from the cooling system, failure sensors for both coolers, and a digital temperature sensor to stop the extractor motor if it reaches high temperatures. The display, a buzzer, and a series of LED lights provide warning indications when necessary.

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