2017
DOI: 10.1038/micronano.2016.78
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Controllable alignment of elongated microorganisms in 3D microspace using electrofluidic devices manufactured by hybrid femtosecond laser microfabrication

Abstract: This paper presents a simple technique to fabricate new electrofluidic devices for the three-dimensional (3D) manipulation of microorganisms by hybrid subtractive and additive femtosecond (fs) laser microfabrication (fs laser-assisted wet etching of glass followed by water-assisted fs laser modification combined with electroless metal plating). The technique enables the formation of patterned metal electrodes in arbitrary regions in closed glass microfluidic channels, which can spatially and temporally control… Show more

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Cited by 30 publications
(19 citation statements)
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“…The low requirement on a multi-plate scheme allows BBP generation with a wide variety of initial laser energy of only several tens to hundreds µJ. With the reported conversion efficiency, µJ-level few-cycle Mid-IR pulses can be directly obtained from a single-stage BBP-OPA pumped by a laser system with moderate pulse energy, which can benefit applications that do not require the ultrahigh energy of femtosecond laser pulses [115][116][117][118][119].…”
Section: Prospects and Conclusionmentioning
confidence: 98%
“…The low requirement on a multi-plate scheme allows BBP generation with a wide variety of initial laser energy of only several tens to hundreds µJ. With the reported conversion efficiency, µJ-level few-cycle Mid-IR pulses can be directly obtained from a single-stage BBP-OPA pumped by a laser system with moderate pulse energy, which can benefit applications that do not require the ultrahigh energy of femtosecond laser pulses [115][116][117][118][119].…”
Section: Prospects and Conclusionmentioning
confidence: 98%
“…All-glass lab-chips were fabricated utilizing commercially available borosilicate glass slides (Borofloat 3.3, Schott, Mainz, Germany). In the literature on the subject, a variety of techniques ensuring fabrication of microstructures in glass substrates can be distinguished, for example, laser ablation [27,28] or sandblasting; nevertheless, in this study, typical micromachining processes including xurography, wet chemical etching, mechanical drilling of via holes, and thermal bonding were applied to achieve final LOC structures ( Figure 2). The pattern of the microchannels/microchambers was formed by submerging the glass slides in a solution of 50% HF/69% HNO 3 (10:1 v/v), etching speed: 3 µm/min.…”
Section: Elements Of the Loc Platformmentioning
confidence: 99%
“…[ 12 ] Furthermore, the integration of microelectronic components in the fabricated microfluidic channels by the subsequent femtosecond laser‐induced selective metallization has been applied for the electrical manipulation of biological samples in nano‐aquariums. [ 13 ] Through the combination of FLAE with successive two‐photon polymerization (TPP), which is an additive processing technology, complex 3D shapes of polymeric structures with submicrometer dimensions have been successfully integrated inside glass microfluidic devices. This novel hybrid FLAE‐TPP technique has been applied to build a multi‐functional filter‐mixer applied for simultaneous rapid fluid mixing and particle filtering within a short channel distance [ 14 ] and to fabricate an optofluidic unit combined with a 3D microlens array and center pass units for counting Euglena cells.…”
Section: Introductionmentioning
confidence: 99%