Controlling energy dissipation and stability of micromechanical silicon resonators with self-assembled monolayers

Henry, Joshua A.; Wang, Yu; Hines, Melissa A.

doi:10.1063/1.1664015

Cited by 25 publications

(32 citation statements)

References 16 publications

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“…In some systems, particularly for small Si oscillators, losses due to surface dissipation may dominate the total measured dissipation [18,21]. The surface may be a source of atomic defects leading to high defect-related dissipation, or, as is the case with Si, the surface may be covered with a lossy material, such as amorphous SiO 2 , that causes a decrease in quality factor as it grows on the surface [22]. For a cantilever geometry, the quality factor of the surface, Q surf , covered with a lossy material of thickness, d, elastic modulus E s , and characteristic dissipation = 1/Q s is given by where t is the oscillator thickness and E is the Young's modulus for the oscillator material, not including the surface.…”

Section: Extrinsic Internal Dissipationmentioning

confidence: 99%

“…Several authors have reported graphitization of DLC films and used this to write conducting lines [16], remove hydrogen [20], and create patterned structures. Others have worked above the ablation threshold to produce patterned structures [17,[22][23][24]. There have been several reports of amorphous-to-crystalline phase transformations in laser-annealed carbon [26] and hydrogenated DLC [15,18,25] thin films.…”

Section: Introductionmentioning

confidence: 99%

“…There have been many studies in the past on laser annealing of carbon films and potential applications [15][16][17][18][19][20][21][22][23][24][25]. Several authors have reported graphitization of DLC films and used this to write conducting lines [16], remove hydrogen [20], and create patterned structures.…”

Section: Introductionmentioning

confidence: 99%

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Nano-electromechanical oscillators (NEMOs) for RF technologies.

Wendt¹,

Czaplewski²,

Gibson

et al. 2004

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Nano-electromechanical oscillators (NEMOs), capacitively-coupled radio frequency (RF) MEMS switches incorporating dissipative dielectrics, new processing technologies for tetrahedral amorphous carbon (ta-C) films, and scientific understanding of dissipation mechanisms in small mechanical structures were developed in this project. NEMOs are defined as mechanical oscillators with critical dimensions of 50 nm or less and resonance frequencies approaching 1 GHz. Target applications for these devices include simple, inexpensive clocks in electrical circuits, passive RF electrical filters, or platforms for sensor arrays. Ta-C NEMO -3 -arrays were used to demonstrate a novel optomechanical structure that shows remarkable sensitivity to small displacements (better than 160 fm/Hz 1/2 ) and suitability as an extremely sensitive accelerometer. The RF MEMS capacitively-coupled switches used ta-C as a dissipative dielectric. The devices showed a unipolar switching response to a unipolar stimulus, indicating the absence of significant dielectric charging, which has historically been the major reliability issue with these switches. This technology is promising for the development of reliable, lowpower RF switches. An excimer laser annealing process was developed that permits full in-plane stress relaxation in ta-C films in air under ambient conditions, permitting the application of stress-reduced ta-C films in areas where low thermal budget is required, e.g. MEMS integration with pre-existing CMOS electronics. Studies of mechanical dissipation in micro-and nano-scale ta-C mechanical oscillators at room temperature revealed that mechanical losses are limited by dissipation associated with mechanical relaxation in a broad spectrum of defects with activation energies for mechanical relaxation ranging from 0.35 eV to over 0.55 eV. This work has established a foundation for the creation of devices based on nanomechanical structures, and outstanding critical research areas that need to be addressed for the successful application of these technologies have been identified.-4 - CONTENTS

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Section: Extrinsic Internal Dissipationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Nano-electromechanical oscillators (NEMOs) for RF technologies.

Wendt¹,

Czaplewski²,

Gibson

et al. 2004

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“…Water adsorbing is believed to be the main cause of drift in unpackaged components. Surface treatment of the unpackaged torsional resonators reduces the drift to less than 100 ppm/week [11]. Ceramic vacuum encapsulated BAW resonators have been demonstrated yield drift less than 1 ppm in 40 days [12].…”

Section: Introductionmentioning

confidence: 99%

“…Unpackaged torsional mode resonators show drift of more than 100 ppm/day [11]. Unpackaged BAW resonators demonstrate stability better than 50 ppm/week [12].…”

Section: Introductionmentioning

confidence: 99%

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Kaajakari

Kiihamäki

Oja

et al.

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDU

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A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical resonators, provide an unprecedented platform for investigating a wide range of applications in both fundamental physical phenomena (such as quantum‐level problems) and engineering and applied sciences (like sensing physical quantities and signal processing). In sensing context, these tiny resonators are invaluable tools for detecting weak forces and single molecules. Measuring such small variations in sub‐nanometer amplitudes at high frequencies has created many practical challenges. Therefore, maximizing the responsivity to a specified input parameter and minimizing the responsivity to other inputs such as noise are considered as the optimal design for the excellent performance in nanoresonators. The present review aims to summarize some of the recent progress in this rapidly advancing field. Specifically, more attention is paid to the topics related to the dynamical behaviors of micro/nanoresonator and their practical applications. First, the theory behind micro/nanoresonators is described. Then a summary is presented of the basic concepts in resonant devices. In addition, several commonly dynamical techniques to enhance sensitivity are introduced. Finally, the devices are classified based on linear and nonlinear, single and array, symmetric and asymmetric, and frequency shift‐based and amplitude shift‐based resonators, along with the relative advantages and disadvantages of each one in engineering applications.

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Controlling energy dissipation and stability of micromechanical silicon resonators with self-assembled monolayers

Cited by 25 publications

References 16 publications

Nano-electromechanical oscillators (NEMOs) for RF technologies.

Nano-electromechanical oscillators (NEMOs) for RF technologies.

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

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