2021
DOI: 10.1007/s12633-021-01027-1
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Controlling of Floating-Body and Thermal Conductivity in Short Channel SOI MOSFET at 30 nm Channel Node

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“…Partially depleted silicon-on-insulator (PDSOI) devices have the advantages of anti-latch-up, a small parasitic effect, fast speed and low power consumption compared with bulk silicon devices and are widely used in electronic communications, automotive electronics, medical, aerospace and other fields, while PDSOI devices have a self-heating effect and floating effect due to the presence of a buried oxygen layer [ 8 , 9 ]. This renders the degradation of PDSOI devices more complex than that of bulk silicon devices under applied stress, which also results in higher requirements for the reliability of the PDSOI device gate dielectric.…”
Section: Introductionmentioning
confidence: 99%
“…Partially depleted silicon-on-insulator (PDSOI) devices have the advantages of anti-latch-up, a small parasitic effect, fast speed and low power consumption compared with bulk silicon devices and are widely used in electronic communications, automotive electronics, medical, aerospace and other fields, while PDSOI devices have a self-heating effect and floating effect due to the presence of a buried oxygen layer [ 8 , 9 ]. This renders the degradation of PDSOI devices more complex than that of bulk silicon devices under applied stress, which also results in higher requirements for the reliability of the PDSOI device gate dielectric.…”
Section: Introductionmentioning
confidence: 99%