The effects of layer thickness and thermal annealing on Curie temperature have been studied for CoPt ultrathin continuous layers in AlN/CoPt multilayer structures. It is found that there exists a critical thickness below which Curie temperature rapidly decreases due to the loss of spin-spin interactions in the vicinity of interface. After high temperature annealing, the in-plane lattice constant of CoPt film is increased and the exchange coupling parameter is decreased. Consequently, Curie temperatures decrease for some films with large thickness, compared with as-deposited state. Upon annealing at 600 • C, CoPt undergoes ordering transformation, which also contributes to the degradation of the Curie temperature. However, when the CoPt film thickness is below 2 nm, the Curie temperature is increased after annealing. Especially for 1 nm thick film, the Curie temperature is strikingly increased from 173 • C to 343 • C after annealing at 600 • C. This effect is attributed to the out-ofplane lattice deformation of CoPt thin layers in AlN/CoPt multilayer structures.