A stiff skin forms on surface areas of a flat polydimethylsiloxane (PDMS) upon exposure to focused ion beam (FIB) leading to ordered surface wrinkles. By controlling the FIB fluence and area of exposure of the PDMS, one can create a variety of patterns in the wavelengths in the micrometer to submicrometer range, from simple one-dimensional wrinkles to peculiar and complex hierarchical nested wrinkles. Examination of the chemical composition of the exposed PDMS reveals that the stiff skin resembles amorphous silica. Moreover, upon formation, the stiff skin tends to expand in the direction perpendicular to the direction of ion beam irradiation. The consequent mismatch strain between the stiff skin and the PDMS substrate buckles the skin, forming the wrinkle patterns. The induced strains in the stiff skin are estimated by measuring the surface length in the buckled state. Estimates of the thickness and stiffness of the stiffened surface layer are estimated by using the theory for buckled films on compliant substrates. The method provides an effective and inexpensive technique to create wrinkled hard skin patterns on surfaces of polymers for various applications.focused ion beam surface modification ͉ polydimethylsiloxane ͉ surface wrinkles W rinkle patterns shown in Fig. 1 are formed by exposing the surface area of a flat polydimethylsiloxane (PDMS) sheet (thickness Ϸ3 mm, Young modulus Ϸ2 MPa) (1) to a focused ion beam (FIB) of Ga ϩ ions as shown schematically in Fig. 1 A. This method can create wrinkle patterns of various widths and complexity by controlling the relative motion of the polymeric substrate and the FIB to scan selected areas as shown in Fig. 1 B-E. The wrinkles appear only on the areas of the PDMS exposed to FIB (see Fig. 1 B and C), due to buckling of the stiff skin formed on the areas of the PDMS exposed to FIB. FIB exposure creates a tendency for the skin to expand in the direction perpendicular to the direction of FIB irradiation if it was not constrained by the PDMS substrate, similar to the effect observed in exposing metallic surfaces to ion beam irradiation (2-4). The mismatch strain between the stiff skin and its substrate give rise to skin buckling and the formation of the wrinkle patterns (5-9). FIB exposure differs from UV/ozone treatment of PDMS in that the latter produces a stiff skin by increasing cross-links with relatively little strain mismatch (10, 11). The morphology of the wrinkle patterns on the surface areas of PDMS is mainly a function of ion fluence as shown in Figs. 1C and 2. Fig. 1D shows that the path of the wrinkle patterns can be selected by controlling the relative motion of the substrate and ion beam. In addition, one can create islands of buckled stiff skins on the PDMS by controlling the ion beam spot diameter and spacing (see Fig. 1E).Various morphologies shown in Fig. 2 A are created by a single mode FIB scanning with the beam current of 1 nA and the fluences indicated. When the PDMS substrate is exposed with a fluence on the order of 1 ϫ 10 13 ions per cm 2 , the...