2000
DOI: 10.1021/cm990770d
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Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes

Abstract: A variety of linear and cross-linked polysiloxanes are transformed into silicon oxide (SiO x ) through the application of a recently developed room-temperature UV/ozone conversion process. Ozone and atomic oxygen, produced by exposure of atmospheric oxygen to ultraviolet radiation, remove organic portions of the polymers as volatile products and leave a thin silicon oxide surface film. The conversion rates differ for each polysiloxane studied and are related to differences in their chemical structures. X-ray p… Show more

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Cited by 267 publications
(264 citation statements)
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“…The estimated skin thickness is Ϸ5 times larger than the thickness of the skin reported on PDMS samples subject to UV/ozone treatment, whereas the stiffness is comparable (10,11,15).…”
mentioning
confidence: 64%
See 1 more Smart Citation
“…The estimated skin thickness is Ϸ5 times larger than the thickness of the skin reported on PDMS samples subject to UV/ozone treatment, whereas the stiffness is comparable (10,11,15).…”
mentioning
confidence: 64%
“…The mismatch strain between the stiff skin and its substrate give rise to skin buckling and the formation of the wrinkle patterns (5)(6)(7)(8)(9). FIB exposure differs from UV/ozone treatment of PDMS in that the latter produces a stiff skin by increasing cross-links with relatively little strain mismatch (10,11). The morphology of the wrinkle patterns on the surface areas of PDMS is mainly a function of ion fluence as shown in Figs.…”
mentioning
confidence: 99%
“…The other side of the Ecoflex substrate was surface activated under UV light for 5 min. Laminating the electrode structures onto this surface led to strong bonding, upon contact 34 . The water-soluble tape was removed by immersing the substrate in tap water for overnight.…”
Section: Methodsmentioning
confidence: 99%
“…Efimenko and coworkers recently reported on fabrication of wrinkles by uniaxially stretching PDMS network sheets (thickness y0.5 mm) in a custom-designed stretching apparatus 43 and exposing them to ultraviolet/ozone (UVO) radiation for extended periods of time (30-60 min). 44 Previous studies established that the UVO treatment of PDMS converts the first y5 nm of the PDMS surface into a stiff skin, 45 whose…”
Section: Wrinkling In Rigid Sheets On Elastic Foundationsmentioning
confidence: 99%