Coordinate-free, frequency-independent universal functions for BAW analysis in SAW devices

Baghai-Wadji, A.R.; Penunuri, D.

doi:10.1109/ultsym.1995.495584

Cited by 15 publications

(3 citation statements)

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“…The stress free solution in ( 21) is exact for d = 0 pm/V (or e = 0 C/m 2 ). Deviations due to piezoelectricity can be well approximated by adjusting the ε T 11 and ε T 33 parameters to a certain extent as shown in For strong piezoelectric coupling, the agreement suffers at low wavenumbers, but the asymptotic behavior as k → ∞ is always accurately reproduced, which is a crucial property as it allows an efficient implementation of the BEM in (6), which is discussed in the following section.…”

Section: Electrostatic Green's Functionmentioning

confidence: 99%

“…By using the convergence acceleration method for alternating series of Longman [25], N can be drastically reduced while retaining high numerical accuracy. For the calculation of the expansion coefficients a i , the matrix M in (10) has to be evaluated for all j and i first, using the right-hand-side integral in (6). The charge distribution is calculated using a truncated version of ( 5)…”

Section: Calculation Of the Electric Field Using Mwrmentioning

confidence: 99%

“…In this work, an efficient and accurate boundary integral technique based on spectral Green's functions (i.e., wavenumber domain representations) is employed to model the transverse deflection of abovementioned structures. A similar approach has been extensively used in the past for modeling wave propagation in surface acoustic wave sensors [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

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Efficient and Accurate Modeling of the Surface Deflection of Thin Layers on Composite Substrates with Applications to Piezoelectric Parameter Measurements

Voglhuber-Brunnmaier

Beigelbeck

Schmid

et al. 2022

Micro

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The electrical and mechanical response of multilayered structures involving a piezoelectric layer and bull’s eye shaped electrodes is investigated. A boundary element method is employed based on spectral domain Green’s functions. With this method, the electric field distribution is determined first, and the local mechanical displacement in a second step. As will be shown, this allows us to exploit cylindrical symmetry for the electric surface charge distribution, but not for the vertical surface displacements. The effect of substrate bending due to in plane-stress, introduced by the piezoelectric constant d31, and the benefits of using bull’s eye electrode geometries with thick metallic backplates intended to reduce this effect are studied. A rigorous analysis and a largely simplified, but accurate approximation are compared. The application of this technique is demonstrated on a practical example for highly efficient and accurate determination of selected piezoelectric coefficients from surface topography measurements on such structures.

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Section: Electrostatic Green's Functionmentioning

confidence: 99%