2022
DOI: 10.1016/j.apsusc.2022.154262
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Copper-incorporated dendritic mesoporous silica nanospheres and enhanced chemical mechanical polishing (CMP) performance via Cu2+/H2O2 heterogeneous Fenton-like system

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Cited by 21 publications
(2 citation statements)
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“…The surface quality of polished silicon wafers after polishing with CTAB-SiO2, CTAC-SiO2, STAB-SiO2 and HDBAC-SiO2 particles can be investigated through their surface topographies, which were achieved by AFM optical microscope. As shown in Figure 7, the AFM micrographs reveal that flat and smooth surfaces without distinct scratches residual particles are achieved by using the asobtained composite particles as abrasives [36,37]. The scratches as well as other microdefects could hardly be observed [38,39].…”
Section: Polishing Performance Of Sio2 Microspherementioning
confidence: 84%
“…The surface quality of polished silicon wafers after polishing with CTAB-SiO2, CTAC-SiO2, STAB-SiO2 and HDBAC-SiO2 particles can be investigated through their surface topographies, which were achieved by AFM optical microscope. As shown in Figure 7, the AFM micrographs reveal that flat and smooth surfaces without distinct scratches residual particles are achieved by using the asobtained composite particles as abrasives [36,37]. The scratches as well as other microdefects could hardly be observed [38,39].…”
Section: Polishing Performance Of Sio2 Microspherementioning
confidence: 84%
“…Initially, Cu 2+ ions undergo reduction by H 2 O 2 to generate Cu + , which subsequently engages in the Fenton-like reaction with H 2 O 2 . This reaction leads to the production of • OH and Cu 2+ , instigating oxidative stress responses. ,, Disruption of the cellular oxidative stress tends to induce bacterial death through DNA damage, protein oxidation, and lipid peroxidation, ultimately resulting in bacterial apoptosis and suppression of biofilm formation.…”
Section: Resultsmentioning
confidence: 99%