Correlation between influence-function quality and predictability of a computer-controlled polishing process

Abstract

A mathematical method has been developed to analyze influence functions that are used in a computer-controlled polishing process. The influence function itself is usually generated by some kind of calibration where the exact procedure is dependent on the process used. The method is able to determine asymmetries in an influence function. Application of this method yields a value that may be used to judge the quality of an influence function. That quality is also an indicator of the variance of the evolving surface error profile, since a close relationship between it and the polishing process exists. On the basis of an ideal, theoretical process, a model to handle and quantify the result of a real polishing process is described. Practical application of this model demonstrates the effect of influence-function quality on the polishing result. Based on this model, the predictability of the polishing result is evaluated. This initiative to judge influence functions by their quality is an important contribution to the development of computer-controlled polishing. Due to improved process reliability, the reject rate will decrease, and the result will be more economic manufacture.

Advanced techniques for computer-controlled polishing

“…60 The more symmetrical an influence function, the higher is its quality, and thus the greater is the probability for a successful polishing procedure. Objective judgement of the polishing tool characteristic with respect to a sufficient polishing result may now be based on this quality value.…”

“…60 However, it is difficult to judge how precisely an influence function represents the actual polishing tool characteristic prior to knowledge of the polishing result. Although it is a computer-controlled polishing process, experience of the machine operator is indispensable in judging the quality of an influence function.…”

Filter algorithm for influence functions in the computer controlled polishing of high-quality optical lenses

“…Then, with high probability, the calculated polishing sequence results in an adequate polishing result [10].…”

“…The quality of an influence function is defined by its symmetry. The more symmetric an influence function, the higher is the probability of achieving adequate polishing results [10]. The quality of an influence function is quantified by its quality value.…”

“…This method increases the quality of the polishing tool removal characteristic; the quality has a decisive influence on the polishing result [10].…”