Correlation study of nanocrystalline carbon doped thin films prepared by a thermionic vacuum arc deposition technique

Abstract

The synthesis of Ag, Mg and Si nanocrystalline, embedded in a hydrogenfree amorphous carbon (aC) matrix, deposited by a high vacuum and free buffer gas technique, were investigated. The films with compact structures and extremely smooth surfaces were prepared using the thermionic vacuum arc method in one electron gun configuration, on glass and silicon substrates. The surface morphology and wettability of the obtained multifunctional thin films were investigated using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and free surface energy (FSE) by See System. The results from the TEM measurements show how the Ag, Mg and Si interacted with carbon and the influence these materials have on the thin film structure formation and the grain size distribution. SEM correlated with EDX results reveal a very precise comparative study, regarding the quantity of the elements that morphed into carbides nanostructures. Also, the FSE results prove how different materials in combination with carbon can make changes to the surface properties.

Synthesis of Cobalt–Nickel Aluminate Spinels Using the Laser-Induced Thermionic Vacuum Arc Method and Thermal Annealing Processes

“…The cathode acts as an electron gun heated by the intensity current of the filament and the anode is a carbon crucible, filled with a mixture of Co granules (99.95% metal basis), Ni granules (99.996%, metal basis), and aluminum granules (99.999%, metal basis) in a weight ratio of 1:1:1. The experimental setup for binary/ternary mixtures has been described elsewhere [ 32 , 33 , 34 ]. After ignition of the plasma, the power applied on the arc discharge was P = 375 W, where P = U a ·I a ; the symbols U a and I a represent the arc voltage and the arc current during deposition, respectively.…”

Thermionic Vacuum Arc—A Versatile Technology for Thin Film Deposition and Its Applications

“…In ref. [126] the prepared hydrogen-free amorphous carbon films doped with Ag, Si, and Mg presented a defined wettability and high corrosion/wear resistance. Ref.…”

Alternatif InGaN İnce Film Üretim Yöntemi: Termiyonik Vakum Ark

“…Termiyon kavramı yüksek sıcaklıkta materyalden elektriksel yüklü parçacığın (elektron veya iyon) salınımı şeklinde tanımlanabilir (Brewer 1928, Richardson 1909. Bu yöntem yüksek erime sıcaklığına sahip materyallerin kullanılabilmesi, yüksek saflıkta, yüksek yüzey tutunmasına sahip ince filmler, düşük erime sıcaklığına sahip materyalin bile üzerine kaplama yapabilme imkânı, ayarlanabilir kaplama hızı, 1 dakikadan daha kısa sürede kaplama yapabilme gibi avantajlara sahiptir (Dinca-Balan et al 2017, Jepu et al 2014, Kaplan et al 2017, Özen et al 2016a, Özen et al 2016b).…”