Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

A great part of interest has been paid for fabricating new materials with novel mechanical, optical, and electrical properties. Boron carbon nitride (BCN) ternary system was applied for variable bandgap semiconductors and systems with extreme hardness. The purpose of this literature review is to provide a brief historical overview of B 4 C and BN, to review recent research trends in the BCN synthesizes, and to summarize the fabrication of BCN thin films by plasma sputtering technique from B 4 C and BN targets in different gas atmospheres. Pre-set criteria are used to discuss the processing parameters affecting BCN performance which includes the gasses flow ratio and effect of temperature. Moreover, many characterization studies such as mechanical, etching, optical, photoluminescence, XPS, and corrosion studies of the RF sputtered BCN thin films are also covered. We further mentioned the application of BCN thin films to enhance the electrical properties of metal-insulator-metal (MIM) devices according to a previous report of Prakash et al. (Opt. Lett. 41, 4249, 2016).

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“…5b). In addition, a B 1.0 C (3.2-4.4) N 1.2 thin film was noticed to exhibit a superior corrosionresistant performance [126].…”

Section: Corrosion Studiesmentioning

confidence: 98%

“…Dissolution rate (−Δd/Δt) of a B 1.0 C 2.4 N 1.0 films in 1 M HCl, 1 M NaCl, and 1 M NaOH mediums, b B 1.0 C (0.5-4.4) N (0.9-1.2) films in 1 M NaOH medium[126] …”

mentioning

confidence: 99%

A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films

2018

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“…Some reports have demonstrated that the incorporation of C into nitrides to form carbonitrides such as TiCN [40] and BCN [4,41] films transforms the material in less electrochemically active films, improving their corrosion resistance. This behaviour results from the increase of the non-metal/metal ratio, which leads to the formation of an a-C phase.…”

Section: Effect Of Metals Incorporation On Me(c)n Electrochemical Resmentioning

confidence: 99%

Electrochemical Corrosion of Nano-Structured Magnetron-Sputtered Coatings

et al. 2019

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Magnetron sputtering has been employed for several decades to produce protective and multi-functional coatings, thanks to its versatility and ability to achieve homogeneous layers. Moreover, it is suitable for depositing coatings with very high melting points and that are thermodynamical unstable, which is difficult to accomplish by other techniques. Among these types of coating, transition metal (Me) carbides/nitrides (MeC/N) and amorphous carbon (a-C) films are particularly interesting because of the possibility of tailoring their properties by selecting the correct amount of phase fractions, varying from pure MeN, MeC, MeCN to pure a-C phases. This complex phase mixture can be even enhanced by adding a fourth element such Ag, Pt, W, Ti, Si, etc., allowing the production of materials with a large diversity of properties. The mixture of phases, resulting from the immiscibility of phases, allows increasing the number of applications, since each phase can contribute with a specific property such as hardness, self-lubrication, antibacterial ability, to create a multifunctional material. However, the existence of different phases, their fractions variation, the type of transition metal and/or alloying element, can drastically alter the global electrochemical behaviour of these films, with a strong impact on their stability. Consequently, it is imperative to understand how the main features intrinsic to the production process, as well as induced by Me and/or the alloying element, influence the characteristics and properties of the coatings and how these affect their electrochemical behaviour. Therefore, this review will focus on the fundamental aspects of the electrochemical behaviour of magnetron-sputtered films as well as of the substrate/film assembly. Special emphasis will be given to the influence of simulated body fluids on the electrochemical behaviour of coatings.

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“…[19][20][21] In addition, the few papers that dealt with more complex ternary nitride structures were either qualitative 16,22 or were used to infer elemental composition using effective medium approximations. [19][20][21] In addition, the few papers that dealt with more complex ternary nitride structures were either qualitative 16,22 or were used to infer elemental composition using effective medium approximations.…”

Section: Introductionmentioning

confidence: 99%

Real time spectroscopic ellipsometry study during the growth of nanocrystalline nitride protective coatings

Aouadi

Debessai

Tomek

et al. 2004

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Articles you may be interested inMechanism of adaptability for the nano-structured TiAlCrSiYN-based hard physical vapor deposition coatings under extreme frictional conditions J. Appl. Phys. 111, 064306 (2012); 10.1063/1.3693032 Growth and characterization of nanocrystalline zirconium nitride-inconel structures J. Vac. Sci. Technol. A 23, 998 (2005); 10.1116/1.1914817 Real-time spectroscopic ellipsometry study of ultrathin diffusion barriers for integrated circuits J. Appl. Phys. 96, 3949 (2004); 10.1063/1.1784621Optical properties of tantalum nitride films fabricated using reactive unbalanced magnetron sputtering Real time spectroscopic ellipsometry ͑RTSE͒ was employed to study the optical, electronic, and transport properties of various classes of nanocrystalline nitride coatings grown by reactive unbalanced magnetron-sputtering. The investigated materials include TaZrN and NbZrN solid solutions, and nc-ZrN/Ag and nc-ZrN/Ni nanocomposites. Film properties were tailored by varying film composition. The following models were used to interpret the ellipsometric data: ͑a͒ effective medium theories describing the heterostructures in terms of their constituent materials and ͑b͒ a combined Drude-Lorentz model describing the optical response of the conduction and valence electrons. A correlation was found between the optical data and the chemical composition using the linear and Bruggeman effective medium approximations for the solid solution and the nanocomposite materials, respectively. The Drude-Lorentz model provided extensive information regarding the optical and electronic properties of the films ͑plasma frequency, electron mean free path, electrical resistivity, and band structure͒. For example, a correlation was made between the conduction electron mean free path and the grain size in nanocomposite films. RTSE findings were confirmed using x-ray diffraction, transmission electron microscopy, and x-ray photoelectron spectroscopy.

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Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

Cited by 9 publications

References 8 publications

A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films

A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films

Electrochemical Corrosion of Nano-Structured Magnetron-Sputtered Coatings

Real time spectroscopic ellipsometry study during the growth of nanocrystalline nitride protective coatings

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